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• W2003200634 abstract "To investigate the distortion of flow visualization data for chemical vapor deposition reactors due to thermophoretic transport of the tracer particles, the motion of solid particles is studied in a horizontal chemical vapor deposition reactor. Flow and temperature fields are determined using the finite element method. The path line of each particle is obtained on a local element-by-element basis by accounting for thermophoretic, drag, and gravity forces on each particle. Fluid flow and temperature profiles combined with thermophoretic phenomena are investigated for the first time in a complex geometry with realistic boundary conditions. Results are presented in terms of the size of the “particle-free” zone above the susceptor and particle path lines and velocities. The effect of the major operating parameters (susceptor temperature, inlet flow rate, carrier gas, operating pressure) on the thermophoretic transport for particles of different sizes and materials is reported. The predicted motion of solid particles shows very good agreement with smoke flow visualization and laser Doppler anemometry measurements. Related issues of particle contamination and so-called “stagnant layer” models are also addressed." @default.
• W2003200634 created "2016-06-24" @default.
• W2003200634 creator A5037813012 @default.
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• W2003200634 date "1990-06-01" @default.
• W2003200634 modified "2023-10-16" @default.
• W2003200634 title "Thermophoresis of solid particles in horizontal chemical vapor deposition reactors" @default.
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• W2003200634 doi "https://doi.org/10.1016/0022-0248(90)90838-c" @default.
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