Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003204419> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2003204419 endingPage "211" @default.
- W2003204419 startingPage "205" @default.
- W2003204419 abstract "Treatment of chemical mechanical polishing (CMP) wastewater is investigated. The CMP wastewater, as obtained from a large semiconductor manufacturer, was characterized by high suspended solids (SS) content, high Nephelometric turbidity unit (NTU), chemical oxygen demand (COD) concentration up to 500 mg/l, copper concentration over 100 mg/l and a milky color. This study was to explore the feasibility of treating the CMP wastewater by electrocoagulation with an aim of simultaneously lowering the wastewater turbidity, and copper and COD concentrations. Experiments were conducted to analyze the characteristics of the CMP wastewater and to evaluate the effects of electrocoagulation time, type of electrode pair and electrolyte dosage on the system performances. The fine suspended oxide particles were found to have an average size of 100 nm with narrow particle size distribution between 68 and 120 nm. The test results revealed that Al/Fe (anode/cathode) was a good electrode pair in terms of overall performances. Electrocoagulation with Al/Fe electrode pair was able to achieve 99% copper removal and 96.5% turbidity reduction in less than 100 min. The COD removal obtained in the treatment was better than 75%, with an effluent COD below 100 mg/l. The wastewater quality exceeded the direct discharge standard and the effluent can be considered for reuse." @default.
- W2003204419 created "2016-06-24" @default.
- W2003204419 creator A5054544268 @default.
- W2003204419 creator A5078744709 @default.
- W2003204419 date "2003-09-01" @default.
- W2003204419 modified "2023-09-30" @default.
- W2003204419 title "Electrocoagulation of chemical mechanical polishing (CMP) wastewater from semiconductor fabrication" @default.
- W2003204419 cites W1965654772 @default.
- W2003204419 cites W1968975215 @default.
- W2003204419 cites W1986102277 @default.
- W2003204419 cites W1999661145 @default.
- W2003204419 cites W2001268799 @default.
- W2003204419 cites W2017916114 @default.
- W2003204419 cites W2027119991 @default.
- W2003204419 cites W2034423042 @default.
- W2003204419 cites W2036654969 @default.
- W2003204419 cites W2052274454 @default.
- W2003204419 cites W2058435190 @default.
- W2003204419 cites W2091989934 @default.
- W2003204419 cites W2074813450 @default.
- W2003204419 doi "https://doi.org/10.1016/s1385-8947(03)00106-2" @default.
- W2003204419 hasPublicationYear "2003" @default.
- W2003204419 type Work @default.
- W2003204419 sameAs 2003204419 @default.
- W2003204419 citedByCount "157" @default.
- W2003204419 countsByYear W20032044192012 @default.
- W2003204419 countsByYear W20032044192013 @default.
- W2003204419 countsByYear W20032044192014 @default.
- W2003204419 countsByYear W20032044192015 @default.
- W2003204419 countsByYear W20032044192016 @default.
- W2003204419 countsByYear W20032044192017 @default.
- W2003204419 countsByYear W20032044192018 @default.
- W2003204419 countsByYear W20032044192019 @default.
- W2003204419 countsByYear W20032044192020 @default.
- W2003204419 countsByYear W20032044192021 @default.
- W2003204419 countsByYear W20032044192022 @default.
- W2003204419 countsByYear W20032044192023 @default.
- W2003204419 crossrefType "journal-article" @default.
- W2003204419 hasAuthorship W2003204419A5054544268 @default.
- W2003204419 hasAuthorship W2003204419A5078744709 @default.
- W2003204419 hasConcept C108225325 @default.
- W2003204419 hasConcept C127413603 @default.
- W2003204419 hasConcept C136525101 @default.
- W2003204419 hasConcept C138113353 @default.
- W2003204419 hasConcept C142724271 @default.
- W2003204419 hasConcept C160671074 @default.
- W2003204419 hasConcept C171250308 @default.
- W2003204419 hasConcept C180088628 @default.
- W2003204419 hasConcept C191897082 @default.
- W2003204419 hasConcept C192562407 @default.
- W2003204419 hasConcept C204787440 @default.
- W2003204419 hasConcept C2777828583 @default.
- W2003204419 hasConcept C39432304 @default.
- W2003204419 hasConcept C42360764 @default.
- W2003204419 hasConcept C49040817 @default.
- W2003204419 hasConcept C66018809 @default.
- W2003204419 hasConcept C71924100 @default.
- W2003204419 hasConcept C87717796 @default.
- W2003204419 hasConcept C94061648 @default.
- W2003204419 hasConceptScore W2003204419C108225325 @default.
- W2003204419 hasConceptScore W2003204419C127413603 @default.
- W2003204419 hasConceptScore W2003204419C136525101 @default.
- W2003204419 hasConceptScore W2003204419C138113353 @default.
- W2003204419 hasConceptScore W2003204419C142724271 @default.
- W2003204419 hasConceptScore W2003204419C160671074 @default.
- W2003204419 hasConceptScore W2003204419C171250308 @default.
- W2003204419 hasConceptScore W2003204419C180088628 @default.
- W2003204419 hasConceptScore W2003204419C191897082 @default.
- W2003204419 hasConceptScore W2003204419C192562407 @default.
- W2003204419 hasConceptScore W2003204419C204787440 @default.
- W2003204419 hasConceptScore W2003204419C2777828583 @default.
- W2003204419 hasConceptScore W2003204419C39432304 @default.
- W2003204419 hasConceptScore W2003204419C42360764 @default.
- W2003204419 hasConceptScore W2003204419C49040817 @default.
- W2003204419 hasConceptScore W2003204419C66018809 @default.
- W2003204419 hasConceptScore W2003204419C71924100 @default.
- W2003204419 hasConceptScore W2003204419C87717796 @default.
- W2003204419 hasConceptScore W2003204419C94061648 @default.
- W2003204419 hasIssue "1-3" @default.
- W2003204419 hasLocation W20032044191 @default.
- W2003204419 hasOpenAccess W2003204419 @default.
- W2003204419 hasPrimaryLocation W20032044191 @default.
- W2003204419 hasRelatedWork W1601360707 @default.
- W2003204419 hasRelatedWork W2052274454 @default.
- W2003204419 hasRelatedWork W2111896949 @default.
- W2003204419 hasRelatedWork W2139625534 @default.
- W2003204419 hasRelatedWork W2146922750 @default.
- W2003204419 hasRelatedWork W2287300551 @default.
- W2003204419 hasRelatedWork W2368784978 @default.
- W2003204419 hasRelatedWork W4213081587 @default.
- W2003204419 hasRelatedWork W4214935472 @default.
- W2003204419 hasRelatedWork W2262968806 @default.
- W2003204419 hasVolume "95" @default.
- W2003204419 isParatext "false" @default.
- W2003204419 isRetracted "false" @default.
- W2003204419 magId "2003204419" @default.
- W2003204419 workType "article" @default.