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• W2003213692 abstract "Lithium Niobate (LiNbO<SUB>3</SUB>) films produced by the crystal ion slicing (CIS) method are introduced in various components in use in the optical telecommunications market. The CIS technique employs high-energy ion implantation to create a narrow (~0.2 micrometers ) planar layer of localized damage, buried ~10 micrometers beneath the surface of the implanted LiNbO<SUB>3</SUB> wafers. This sacrificial layer allows for slicing of microns-thick LiNbO<SUB>3</SUB> films, either by selective wet chemical etching or by thermal shock. The obtained films have bulk material properties and morphology suitable for integrated optics applications. Slices of X-cut LiNbO<SUB>3</SUB> were used to produce zero-order wave retarders that can be inserted in slots cut into planar lightwave circuits, resulting in TE-TM polarization mode conversion with high extinction ratio (30 dB) and low excess loss (<0.1 dB). Conventional LiNbO<SUB>3</SUB> waveguide fabrication techniques were combined with the CIS process to produce CIS films of Z-cut LiNbO<SUB>3</SUB> with optical circuits patterned prior to lift-off, having propagation losses typical of bulk LiNbO<SUB>3</SUB> waveguides. Using thin sheets of LiNbO<SUB>3</SUB>, velocity- and impedance-matched modulators can be fabricated with low V<SUB>(pi</SUB> )L(~7.6 V.cm) and low microwave losses (0.3 db/cm.GHz<SUP>1/2</SUP>). The CIS film optical circuits can be integrated into hybrid systems with otherwise incompatible, yet technologically important materials platforms." @default.
• W2003213692 created "2016-06-24" @default.
• W2003213692 creator A5025565296 @default.
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• W2003213692 date "2002-06-06" @default.
• W2003213692 modified "2023-09-25" @default.
• W2003213692 title "Hybrid-integrated polarization mode converters and low-voltage electro-optic modulators using crystal-ion-sliced LiNbO 3 films" @default.
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• W2003213692 doi "https://doi.org/10.1117/12.469572" @default.
• W2003213692 hasPublicationYear "2002" @default.
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