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- W2003265205 abstract "This work presents a reproductible fabrication process of spiral phase plates (SPPs) based on microfabrication techniques such as photolithography and reactive ion etching (RIE). The fabricated SPPs operate in the reflection mode in order to generate optical vortices with topological charge m = 2 and m = 4. Structural and functional characterizations prove the optical quality of the fabricated SPP." @default.
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- W2003265205 date "2014-10-01" @default.
- W2003265205 modified "2023-09-23" @default.
- W2003265205 title "Fabrication of spiral phase plates for optical vortices" @default.
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- W2003265205 doi "https://doi.org/10.1109/smicnd.2014.6966416" @default.
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