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- W2003289364 abstract "Focal planes of 80x60 VOx microbolometers with pixel pitch of 104 μm were developed in support of the remote sensingof ice clouds in the spectral range from 7.9 to 50 μm. A new design that relies on the use of central posts to support themicrobolometer platform was shown effective in minimizing the structural deformation usually occurred in platforms oflarge area. A process for goldblack coating and patterning of the focal plane arrays was established. It was found that thegoldblack absorbs more than 98 % and 92 % of incident light respectively at wavelengths shorter and longer than 20 μm.Moreover, a spectral uniformity of better than 96 % was achieved in all spectral channels required for the measurements.The noise figures derived from the data acquired over short periods of acquisition time showed the evidence of acorrelation with the format of the addressed sub-arrays. This correlation was not observed in the data acquired over longperiods of time, suggesting the presence of low frequency effects. Regardless of the length of acquisition time, animprovement of noise level could be confirmed when the operating temperature was increased. The dependence ofresponsivity on sub-array format and operating temperature was investigated. The noise equivalent power derived fromthis study was found to be in the range from 45 to 80 pW, showing that the far infrared focal plane arrays are suited foruse in the intended application." @default.
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- W2003289364 date "2015-02-27" @default.
- W2003289364 modified "2023-09-23" @default.
- W2003289364 title "Far infrared microbolometers for radiometric measurements of ice cloud" @default.
- W2003289364 cites W2044026592 @default.
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- W2003289364 doi "https://doi.org/10.1117/12.2076219" @default.
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