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• W2003303264 abstract "Metastable polycrystalline permalloy monoxide films (Ni81Fe19)O or PyO, with NiO-type rocksalt crystalline have been fabricated by reactive dual ion beam sputtering (RDIBS). These materials were characterized with high angle X-ray diffraction (HAXRD), X-ray reflectivity (XRR) and vibrating sample magnetometry (VSM). Permalloy monoxide films ranging in thickness from 30 to 100 nm were investigated. The crystalline and magnetic properties of these metastable oxide films are found to depend on (1) the choice of specular versus non-specular RDIBS geometric placement of the ion beam target sputtering source, target and substrate; (2) the use of Ar+ (lighter) or Kr+ (heavier) sputter ions; and (3) the choice of substrate temperature during sputtering. In addition, the use of modest 500 K post-deposition vacuum anneals in a static magnetic film were also observed to greatly improve the magnetic properties of exchanged biased PyO/Py bilayer structures (Py=Ni81Fe19). When optimally processed, RDIBS fabricated permalloy monoxide films can be used to fabricate exchange biased PyO/Py bilayers with improved coercivity characteristics than previously found in equivalent magnetron sputtered PyO/Py or similarly ion beam sputtered NiO/Py bilayer samples." @default.
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• W2003303264 date "2004-04-01" @default.
• W2003303264 modified "2023-09-27" @default.
• W2003303264 title "The influence of ion beam sputtering geometry on metastable (Ni81Fe19)O/Ni81Fe19 exchange biased bilayers" @default.
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• W2003303264 doi "https://doi.org/10.1016/j.jallcom.2003.09.088" @default.
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