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- W2003345276 abstract "Acid-catalyzed polymer reactions have been successfully utilized in the design of chemical amplification resist systems for semiconductor manufacturing. In this paper are described preparation and acid-catalyzed depolymerization reactions of α-substituted polystyrenes." @default.
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- W2003345276 date "1992-01-01" @default.
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- W2003345276 title "Sensitive resist systems based on acid-catalyzed polymer reactions" @default.
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- W2003345276 doi "https://doi.org/10.1002/masy.19920530114" @default.
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