FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003448544> ?p ?o ?g. }

• W2003448544 endingPage "3271" @default.
• W2003448544 startingPage "3264" @default.
• W2003448544 abstract "Nitrogen segregation and coprecipitation with oxygen in N-doped Czochralski (N-CZ) silicon wafers are investigated as a function of depth based on extended defect structure and chemical composition. High resolution nitrogen and oxygen secondary ion mass spectroscopy imaging revealed strong coupling of oxygen with nitrogen in annealed as well as in “as-grown” N-CZ Si wafers. In both cases, the near-surface regions appeared highly supersaturated in N and O forming a continuum of defects initiated by N-O complexes. The N and O stoichiometry depth profiles were found to depend on the material thermal history. The spatial variation of the stoichiometry ratio was also determined for precipitates using a combination of scanning transmission electron microscope (STEM) in Z-contrast mode with electron energy loss spectroscopy. The precipitate atomic and microstructures, analyzed by high resolution TEM and STEM, clearly demonstrate that second phase precipitate is precursor to a third phase that is an outer oxynitride shell. Nitrogen and oxygen cosegregation from the matrix to the precipitate interface occurs in a similar fashion as in the subsurface region. We propose a mechanism for oxygen precipitation in N-CZ Si based on N segregation to the interface while oxygen is trapped inside the oxynitride shell." @default.
• W2003448544 created "2016-06-24" @default.
• W2003448544 creator A5025930191 @default.
• W2003448544 creator A5029505486 @default.
• W2003448544 date "2004-09-02" @default.
• W2003448544 modified "2023-10-16" @default.
• W2003448544 title "Oxygen precipitation in nitrogen doped Czochralski silicon wafers. II. Effects of nitrogen and oxygen coupling" @default.
• W2003448544 cites W1971985489 @default.
• W2003448544 cites W1973826549 @default.
• W2003448544 cites W1977190716 @default.
• W2003448544 cites W1977300152 @default.
• W2003448544 cites W1987605523 @default.
• W2003448544 cites W1989133343 @default.
• W2003448544 cites W2005133254 @default.
• W2003448544 cites W2020455866 @default.
• W2003448544 cites W2031391449 @default.
• W2003448544 cites W2043169244 @default.
• W2003448544 cites W2046902868 @default.
• W2003448544 cites W2054139806 @default.
• W2003448544 cites W2060282877 @default.
• W2003448544 cites W2073074666 @default.
• W2003448544 cites W2075794555 @default.
• W2003448544 cites W2079659865 @default.
• W2003448544 cites W2080862533 @default.
• W2003448544 cites W2086389862 @default.
• W2003448544 cites W2095325734 @default.
• W2003448544 cites W2102824994 @default.
• W2003448544 cites W2145968069 @default.
• W2003448544 cites W4380869199 @default.
• W2003448544 doi "https://doi.org/10.1063/1.1773922" @default.
• W2003448544 hasPublicationYear "2004" @default.
• W2003448544 type Work @default.
• W2003448544 sameAs 2003448544 @default.
• W2003448544 citedByCount "14" @default.
• W2003448544 countsByYear W20034485442012 @default.
• W2003448544 countsByYear W20034485442013 @default.
• W2003448544 countsByYear W20034485442014 @default.
• W2003448544 countsByYear W20034485442019 @default.
• W2003448544 countsByYear W20034485442021 @default.
• W2003448544 countsByYear W20034485442023 @default.
• W2003448544 crossrefType "journal-article" @default.
• W2003448544 hasAuthorship W2003448544A5025930191 @default.
• W2003448544 hasAuthorship W2003448544A5029505486 @default.
• W2003448544 hasConcept C107054158 @default.
• W2003448544 hasConcept C113196181 @default.
• W2003448544 hasConcept C121332964 @default.
• W2003448544 hasConcept C144082473 @default.
• W2003448544 hasConcept C146088050 @default.
• W2003448544 hasConcept C147789679 @default.
• W2003448544 hasConcept C153294291 @default.
• W2003448544 hasConcept C160671074 @default.
• W2003448544 hasConcept C171250308 @default.
• W2003448544 hasConcept C178187954 @default.
• W2003448544 hasConcept C178790620 @default.
• W2003448544 hasConcept C185592680 @default.
• W2003448544 hasConcept C191897082 @default.
• W2003448544 hasConcept C192562407 @default.
• W2003448544 hasConcept C193016168 @default.
• W2003448544 hasConcept C2777431650 @default.
• W2003448544 hasConcept C2779476251 @default.
• W2003448544 hasConcept C32891209 @default.
• W2003448544 hasConcept C43617362 @default.
• W2003448544 hasConcept C537208039 @default.
• W2003448544 hasConcept C540031477 @default.
• W2003448544 hasConcept C544956773 @default.
• W2003448544 hasConcept C62520636 @default.
• W2003448544 hasConceptScore W2003448544C107054158 @default.
• W2003448544 hasConceptScore W2003448544C113196181 @default.
• W2003448544 hasConceptScore W2003448544C121332964 @default.
• W2003448544 hasConceptScore W2003448544C144082473 @default.
• W2003448544 hasConceptScore W2003448544C146088050 @default.
• W2003448544 hasConceptScore W2003448544C147789679 @default.
• W2003448544 hasConceptScore W2003448544C153294291 @default.
• W2003448544 hasConceptScore W2003448544C160671074 @default.
• W2003448544 hasConceptScore W2003448544C171250308 @default.
• W2003448544 hasConceptScore W2003448544C178187954 @default.
• W2003448544 hasConceptScore W2003448544C178790620 @default.
• W2003448544 hasConceptScore W2003448544C185592680 @default.
• W2003448544 hasConceptScore W2003448544C191897082 @default.
• W2003448544 hasConceptScore W2003448544C192562407 @default.
• W2003448544 hasConceptScore W2003448544C193016168 @default.
• W2003448544 hasConceptScore W2003448544C2777431650 @default.
• W2003448544 hasConceptScore W2003448544C2779476251 @default.
• W2003448544 hasConceptScore W2003448544C32891209 @default.
• W2003448544 hasConceptScore W2003448544C43617362 @default.
• W2003448544 hasConceptScore W2003448544C537208039 @default.
• W2003448544 hasConceptScore W2003448544C540031477 @default.
• W2003448544 hasConceptScore W2003448544C544956773 @default.
• W2003448544 hasConceptScore W2003448544C62520636 @default.
• W2003448544 hasIssue "6" @default.
• W2003448544 hasLocation W20034485441 @default.
• W2003448544 hasOpenAccess W2003448544 @default.
• W2003448544 hasPrimaryLocation W20034485441 @default.
• W2003448544 hasRelatedWork W1979625454 @default.
• W2003448544 hasRelatedWork W2011552499 @default.
• W2003448544 hasRelatedWork W2031391449 @default.
• W2003448544 hasRelatedWork W2043936101 @default.
• W2003448544 hasRelatedWork W2092757271 @default.

• next