FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003453432> ?p ?o ?g. }

• W2003453432 endingPage "175" @default.
• W2003453432 startingPage "170" @default.
• W2003453432 abstract "The barrier properties of W, W2N and WN layers to prevent intermixing of Cu wiring with the Si substrate were investigated. W, W2N and WN barrier layers 25 nm thick were found to prevent intermixing after annealing at 650, 790 and 500°C for 30 min, respectively. W2N, which showed the best barrier property, had a polycrystalline structure with disordered grain boundaries, and Cu diffusion in W2N was concluded to be controlled by grain boundaries of the W2N layer based on the diffusional analysis of Cu in W2N." @default.
• W2003453432 created "2016-06-24" @default.
• W2003453432 creator A5005546566 @default.
• W2003453432 creator A5032910560 @default.
• W2003453432 creator A5054312036 @default.
• W2003453432 creator A5055560911 @default.
• W2003453432 creator A5071339843 @default.
• W2003453432 creator A5079641092 @default.
• W2003453432 creator A5089273020 @default.
• W2003453432 creator A5091858799 @default.
• W2003453432 date "1996-09-01" @default.
• W2003453432 modified "2023-10-02" @default.
• W2003453432 title "WNx diffusion barriers between Si and Cu" @default.
• W2003453432 cites W1968893043 @default.
• W2003453432 cites W1983406786 @default.
• W2003453432 cites W1984319292 @default.
• W2003453432 cites W1988375063 @default.
• W2003453432 cites W1998521243 @default.
• W2003453432 cites W2003071700 @default.
• W2003453432 cites W2007551590 @default.
• W2003453432 cites W2009003566 @default.
• W2003453432 cites W2012829058 @default.
• W2003453432 cites W2021466971 @default.
• W2003453432 cites W2029021689 @default.
• W2003453432 cites W2063947867 @default.
• W2003453432 cites W2076091937 @default.
• W2003453432 cites W2077461818 @default.
• W2003453432 cites W2115609956 @default.
• W2003453432 doi "https://doi.org/10.1016/s0040-6090(96)08553-7" @default.
• W2003453432 hasPublicationYear "1996" @default.
• W2003453432 type Work @default.
• W2003453432 sameAs 2003453432 @default.
• W2003453432 citedByCount "133" @default.
• W2003453432 countsByYear W20034534322012 @default.
• W2003453432 countsByYear W20034534322013 @default.
• W2003453432 countsByYear W20034534322014 @default.
• W2003453432 countsByYear W20034534322015 @default.
• W2003453432 countsByYear W20034534322016 @default.
• W2003453432 countsByYear W20034534322017 @default.
• W2003453432 countsByYear W20034534322018 @default.
• W2003453432 countsByYear W20034534322019 @default.
• W2003453432 countsByYear W20034534322020 @default.
• W2003453432 countsByYear W20034534322021 @default.
• W2003453432 countsByYear W20034534322022 @default.
• W2003453432 countsByYear W20034534322023 @default.
• W2003453432 crossrefType "journal-article" @default.
• W2003453432 hasAuthorship W2003453432A5005546566 @default.
• W2003453432 hasAuthorship W2003453432A5032910560 @default.
• W2003453432 hasAuthorship W2003453432A5054312036 @default.
• W2003453432 hasAuthorship W2003453432A5055560911 @default.
• W2003453432 hasAuthorship W2003453432A5071339843 @default.
• W2003453432 hasAuthorship W2003453432A5079641092 @default.
• W2003453432 hasAuthorship W2003453432A5089273020 @default.
• W2003453432 hasAuthorship W2003453432A5091858799 @default.
• W2003453432 hasConcept C121332964 @default.
• W2003453432 hasConcept C137637335 @default.
• W2003453432 hasConcept C171250308 @default.
• W2003453432 hasConcept C183808158 @default.
• W2003453432 hasConcept C185592680 @default.
• W2003453432 hasConcept C191897082 @default.
• W2003453432 hasConcept C192562407 @default.
• W2003453432 hasConcept C26873012 @default.
• W2003453432 hasConcept C2777855556 @default.
• W2003453432 hasConcept C2778836790 @default.
• W2003453432 hasConcept C2779227376 @default.
• W2003453432 hasConcept C2779833192 @default.
• W2003453432 hasConcept C47908070 @default.
• W2003453432 hasConcept C69357855 @default.
• W2003453432 hasConcept C8010536 @default.
• W2003453432 hasConcept C87976508 @default.
• W2003453432 hasConcept C97355855 @default.
• W2003453432 hasConceptScore W2003453432C121332964 @default.
• W2003453432 hasConceptScore W2003453432C137637335 @default.
• W2003453432 hasConceptScore W2003453432C171250308 @default.
• W2003453432 hasConceptScore W2003453432C183808158 @default.
• W2003453432 hasConceptScore W2003453432C185592680 @default.
• W2003453432 hasConceptScore W2003453432C191897082 @default.
• W2003453432 hasConceptScore W2003453432C192562407 @default.
• W2003453432 hasConceptScore W2003453432C26873012 @default.
• W2003453432 hasConceptScore W2003453432C2777855556 @default.
• W2003453432 hasConceptScore W2003453432C2778836790 @default.
• W2003453432 hasConceptScore W2003453432C2779227376 @default.
• W2003453432 hasConceptScore W2003453432C2779833192 @default.
• W2003453432 hasConceptScore W2003453432C47908070 @default.
• W2003453432 hasConceptScore W2003453432C69357855 @default.
• W2003453432 hasConceptScore W2003453432C8010536 @default.
• W2003453432 hasConceptScore W2003453432C87976508 @default.
• W2003453432 hasConceptScore W2003453432C97355855 @default.
• W2003453432 hasIssue "1-2" @default.
• W2003453432 hasLocation W20034534321 @default.
• W2003453432 hasOpenAccess W2003453432 @default.
• W2003453432 hasPrimaryLocation W20034534321 @default.
• W2003453432 hasRelatedWork W2001101927 @default.
• W2003453432 hasRelatedWork W2003801716 @default.
• W2003453432 hasRelatedWork W2017092459 @default.
• W2003453432 hasRelatedWork W2020185829 @default.
• W2003453432 hasRelatedWork W2032917906 @default.
• W2003453432 hasRelatedWork W2039716771 @default.

• next