Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003465566> ?p ?o ?g. }
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90
with 100 items per page.
- W2003465566 endingPage "586" @default.
- W2003465566 startingPage "583" @default.
- W2003465566 abstract "We describe an epitaxial growth technique called uniform radial flow epitaxy (URFE) for growing thin layer heterostructures of III–V compound semiconductors. The geometry of the URFE reactor is similar to the configuration used in vapor levitation epitaxy (VLE) but the growth vapors are delivered to the top of the substrate which is resting on a paddle. This design allows samples of arbitrary shape to be used while retaining the proven ability of the VLE to grow thin layer heterostructures with abrupt interfaces. The relaxed tolerances of the URFE reactor result in easier fabrication of the quartz reactor. A unique feature of the URFE reactor incorporates an isolating gas curtain between the deposition chambers to assure interface abruptness. Early growths have yielded epitaxial layers of the InP and InGaAs less than 100 Å thick with 5%–8% uniformity in layer thickness over 1 inch square samples." @default.
- W2003465566 created "2016-06-24" @default.
- W2003465566 creator A5003270677 @default.
- W2003465566 creator A5043610179 @default.
- W2003465566 creator A5049221263 @default.
- W2003465566 date "1991-06-01" @default.
- W2003465566 modified "2023-09-27" @default.
- W2003465566 title "Uniform radial flow epitaxy for thin layer heterostructures" @default.
- W2003465566 cites W1964639749 @default.
- W2003465566 cites W1978412897 @default.
- W2003465566 cites W1993663707 @default.
- W2003465566 cites W2003188268 @default.
- W2003465566 cites W2004449788 @default.
- W2003465566 cites W2010027999 @default.
- W2003465566 cites W2041886736 @default.
- W2003465566 cites W2045152598 @default.
- W2003465566 cites W2078508444 @default.
- W2003465566 cites W2092321086 @default.
- W2003465566 cites W2126564887 @default.
- W2003465566 cites W2167517912 @default.
- W2003465566 doi "https://doi.org/10.1016/0022-0248(91)90338-6" @default.
- W2003465566 hasPublicationYear "1991" @default.
- W2003465566 type Work @default.
- W2003465566 sameAs 2003465566 @default.
- W2003465566 citedByCount "3" @default.
- W2003465566 crossrefType "journal-article" @default.
- W2003465566 hasAuthorship W2003465566A5003270677 @default.
- W2003465566 hasAuthorship W2003465566A5043610179 @default.
- W2003465566 hasAuthorship W2003465566A5049221263 @default.
- W2003465566 hasConcept C110738630 @default.
- W2003465566 hasConcept C111368507 @default.
- W2003465566 hasConcept C127313418 @default.
- W2003465566 hasConcept C136525101 @default.
- W2003465566 hasConcept C142724271 @default.
- W2003465566 hasConcept C151730666 @default.
- W2003465566 hasConcept C159985019 @default.
- W2003465566 hasConcept C171250308 @default.
- W2003465566 hasConcept C19067145 @default.
- W2003465566 hasConcept C192562407 @default.
- W2003465566 hasConcept C204787440 @default.
- W2003465566 hasConcept C2777289219 @default.
- W2003465566 hasConcept C2779227376 @default.
- W2003465566 hasConcept C2779870107 @default.
- W2003465566 hasConcept C2816523 @default.
- W2003465566 hasConcept C48123060 @default.
- W2003465566 hasConcept C49040817 @default.
- W2003465566 hasConcept C64297162 @default.
- W2003465566 hasConcept C71924100 @default.
- W2003465566 hasConcept C79794668 @default.
- W2003465566 hasConceptScore W2003465566C110738630 @default.
- W2003465566 hasConceptScore W2003465566C111368507 @default.
- W2003465566 hasConceptScore W2003465566C127313418 @default.
- W2003465566 hasConceptScore W2003465566C136525101 @default.
- W2003465566 hasConceptScore W2003465566C142724271 @default.
- W2003465566 hasConceptScore W2003465566C151730666 @default.
- W2003465566 hasConceptScore W2003465566C159985019 @default.
- W2003465566 hasConceptScore W2003465566C171250308 @default.
- W2003465566 hasConceptScore W2003465566C19067145 @default.
- W2003465566 hasConceptScore W2003465566C192562407 @default.
- W2003465566 hasConceptScore W2003465566C204787440 @default.
- W2003465566 hasConceptScore W2003465566C2777289219 @default.
- W2003465566 hasConceptScore W2003465566C2779227376 @default.
- W2003465566 hasConceptScore W2003465566C2779870107 @default.
- W2003465566 hasConceptScore W2003465566C2816523 @default.
- W2003465566 hasConceptScore W2003465566C48123060 @default.
- W2003465566 hasConceptScore W2003465566C49040817 @default.
- W2003465566 hasConceptScore W2003465566C64297162 @default.
- W2003465566 hasConceptScore W2003465566C71924100 @default.
- W2003465566 hasConceptScore W2003465566C79794668 @default.
- W2003465566 hasIssue "2-3" @default.
- W2003465566 hasLocation W20034655661 @default.
- W2003465566 hasOpenAccess W2003465566 @default.
- W2003465566 hasPrimaryLocation W20034655661 @default.
- W2003465566 hasRelatedWork W1972495690 @default.
- W2003465566 hasRelatedWork W2045328179 @default.
- W2003465566 hasRelatedWork W2055754760 @default.
- W2003465566 hasRelatedWork W2058676402 @default.
- W2003465566 hasRelatedWork W2071401920 @default.
- W2003465566 hasRelatedWork W2139871202 @default.
- W2003465566 hasRelatedWork W2296061439 @default.
- W2003465566 hasRelatedWork W3026245853 @default.
- W2003465566 hasRelatedWork W3127957381 @default.
- W2003465566 hasRelatedWork W4284706829 @default.
- W2003465566 hasVolume "112" @default.
- W2003465566 isParatext "false" @default.
- W2003465566 isRetracted "false" @default.
- W2003465566 magId "2003465566" @default.
- W2003465566 workType "article" @default.