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- W2003469080 abstract "The small moving parts in acoustic and vibration microsensors are especially susceptible to mechanical noise resulting from molecular agitation. For sensors designed for small-signal applications, this mechanical-thermal noise is often one of the limiting noise components. Several techniques for calculating the mechanical-thermal noise in acoustic and vibration sensors in general, and in micromachined sensors in particular, are reviewed.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2003469080 title "Mechanical-thermal noise in micromachined acoustic and vibration sensors" @default.
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