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- W2003511907 abstract "A novel subquarter-micrometre MOSFET with a selfaligned source and drain structure is proposed with elevated sources and drains formed by using polysilicon spacers. The spacers can reduce the effective channel length by 50% compared to the mask length, and reduce the junction capacitance by over 30% through a reduction in junction area, as shown by PISCES simulations. A graded oxide spacer is used to decrease the parasitic gate-to-drain capacitance." @default.
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- W2003511907 date "1994-09-15" @default.
- W2003511907 modified "2023-09-23" @default.
- W2003511907 title "Subquarter-micrometre elevated source-and-drain MOSFET structure using polysilicon spacers" @default.
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- W2003511907 doi "https://doi.org/10.1049/el:19941068" @default.
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