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- W2003588134 endingPage "499" @default.
- W2003588134 startingPage "492" @default.
- W2003588134 abstract "Oxidation of tantalum disilicide films deposited by cosputtering on highly phosphorus doped polycrystalline silicon was investigated as a function of various film preparation parameters. The thermal oxides, with a thickness of about 100 nm, were characterized by cross-sectional TEM, AES, and SIMS depth-profiling as well as breakdown strength measurements on small-area and large-area capacitors. No limitation on oxide growth for dry and steam oxidation was found in the investigated temperature range of 800 to 1000 °C. The removal of the native oxide on the poly-Si prior to TaSi2 deposition by an HF dip or by backsputtering is crucial for reproducible oxide growth. The nature of the oxide is similar to thermal SiO2 on (100) Si. The TaSi2 film integrity is maintained during oxidation. The high surface and interface roughnesses cause oxide thickness variations of about 50%. A high mass fraction of the order of 0.5 wt.% phosphorus was found in the oxides. The breakdown strength of both steam and dry oxides is about one order of magnitude lower than the values for thermal oxides on n+-poly-Si. These low breakdown strength values are attributed mainly to large pores in the oxides observed in the TEM. No restrictions on process compatibility were found." @default.
- W2003588134 created "2016-06-24" @default.
- W2003588134 creator A5022481837 @default.
- W2003588134 date "1985-03-01" @default.
- W2003588134 modified "2023-09-28" @default.
- W2003588134 title "Characterization of thermal oxides grown on TaSi2/polysilicon films" @default.
- W2003588134 doi "https://doi.org/10.1116/1.583305" @default.
- W2003588134 hasPublicationYear "1985" @default.
- W2003588134 type Work @default.
- W2003588134 sameAs 2003588134 @default.
- W2003588134 citedByCount "11" @default.
- W2003588134 countsByYear W20035881342013 @default.
- W2003588134 countsByYear W20035881342016 @default.
- W2003588134 crossrefType "journal-article" @default.
- W2003588134 hasAuthorship W2003588134A5022481837 @default.
- W2003588134 hasConcept C113196181 @default.
- W2003588134 hasConcept C137637335 @default.
- W2003588134 hasConcept C159985019 @default.
- W2003588134 hasConcept C171250308 @default.
- W2003588134 hasConcept C185592680 @default.
- W2003588134 hasConcept C191897082 @default.
- W2003588134 hasConcept C192562407 @default.
- W2003588134 hasConcept C2779227376 @default.
- W2003588134 hasConcept C2779281663 @default.
- W2003588134 hasConcept C2779851234 @default.
- W2003588134 hasConcept C2780565262 @default.
- W2003588134 hasConcept C43617362 @default.
- W2003588134 hasConcept C514619126 @default.
- W2003588134 hasConcept C544956773 @default.
- W2003588134 hasConcept C57410435 @default.
- W2003588134 hasConcept C87359718 @default.
- W2003588134 hasConceptScore W2003588134C113196181 @default.
- W2003588134 hasConceptScore W2003588134C137637335 @default.
- W2003588134 hasConceptScore W2003588134C159985019 @default.
- W2003588134 hasConceptScore W2003588134C171250308 @default.
- W2003588134 hasConceptScore W2003588134C185592680 @default.
- W2003588134 hasConceptScore W2003588134C191897082 @default.
- W2003588134 hasConceptScore W2003588134C192562407 @default.
- W2003588134 hasConceptScore W2003588134C2779227376 @default.
- W2003588134 hasConceptScore W2003588134C2779281663 @default.
- W2003588134 hasConceptScore W2003588134C2779851234 @default.
- W2003588134 hasConceptScore W2003588134C2780565262 @default.
- W2003588134 hasConceptScore W2003588134C43617362 @default.
- W2003588134 hasConceptScore W2003588134C514619126 @default.
- W2003588134 hasConceptScore W2003588134C544956773 @default.
- W2003588134 hasConceptScore W2003588134C57410435 @default.
- W2003588134 hasConceptScore W2003588134C87359718 @default.
- W2003588134 hasIssue "2" @default.
- W2003588134 hasLocation W20035881341 @default.
- W2003588134 hasOpenAccess W2003588134 @default.
- W2003588134 hasPrimaryLocation W20035881341 @default.
- W2003588134 hasRelatedWork W1973544168 @default.
- W2003588134 hasRelatedWork W1981706660 @default.
- W2003588134 hasRelatedWork W1994082984 @default.
- W2003588134 hasRelatedWork W1999575527 @default.
- W2003588134 hasRelatedWork W2000645312 @default.
- W2003588134 hasRelatedWork W2036238187 @default.
- W2003588134 hasRelatedWork W2040918790 @default.
- W2003588134 hasRelatedWork W2051511427 @default.
- W2003588134 hasRelatedWork W4241675710 @default.
- W2003588134 hasRelatedWork W4386296728 @default.
- W2003588134 hasVolume "3" @default.
- W2003588134 isParatext "false" @default.
- W2003588134 isRetracted "false" @default.
- W2003588134 magId "2003588134" @default.
- W2003588134 workType "article" @default.