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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003652020> ?p ?o ?g. }

• W2003652020 endingPage "012046" @default.
• W2003652020 startingPage "012046" @default.
• W2003652020 abstract "Bilayer DLC/a-Si films was deposited on germanium substrate. a-Si films was initially deposited as a seed layer on the substrate using DC magnetron sputtering. DLC films was then deposited on the a-Si layer via a pulsed filtered cathodic arc (PFCA) system. In situ ellipsometry was used to monitor growth in thickness of a-Si and DLC films, allowing a good control over growth conditions. The thickness of DLC and a-Si layers were 9 nm and 6 nm, respectively. In this work, the interface of a-Si and DLC layers was investigated by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). It was found that the SiC layer was formed at the interface of a-Si and DLC layers." @default.
• W2003652020 created "2016-06-24" @default.
• W2003652020 creator A5055275752 @default.
• W2003652020 creator A5064695331 @default.
• W2003652020 creator A5067599381 @default.
• W2003652020 creator A5084842265 @default.
• W2003652020 creator A5088158860 @default.
• W2003652020 date "2013-03-01" @default.
• W2003652020 modified "2023-09-28" @default.
• W2003652020 title "Formation of SiC in DLC/a-Si films as characterized by Raman spectroscopy and XPS" @default.
• W2003652020 cites W1967387078 @default.
• W2003652020 cites W1972479003 @default.
• W2003652020 cites W1978802394 @default.
• W2003652020 cites W1986503937 @default.
• W2003652020 cites W1988133629 @default.
• W2003652020 cites W2010367175 @default.
• W2003652020 cites W2013905923 @default.
• W2003652020 cites W2015716366 @default.
• W2003652020 cites W2044795690 @default.
• W2003652020 cites W2061659551 @default.
• W2003652020 cites W2085955035 @default.
• W2003652020 cites W2087203202 @default.
• W2003652020 cites W2094743646 @default.
• W2003652020 cites W2119999214 @default.
• W2003652020 cites W2126477580 @default.
• W2003652020 cites W2138624009 @default.
• W2003652020 cites W2168144153 @default.
• W2003652020 doi "https://doi.org/10.1088/1742-6596/417/1/012046" @default.
• W2003652020 hasPublicationYear "2013" @default.
• W2003652020 type Work @default.
• W2003652020 sameAs 2003652020 @default.
• W2003652020 citedByCount "0" @default.
• W2003652020 crossrefType "journal-article" @default.
• W2003652020 hasAuthorship W2003652020A5055275752 @default.
• W2003652020 hasAuthorship W2003652020A5064695331 @default.
• W2003652020 hasAuthorship W2003652020A5067599381 @default.
• W2003652020 hasAuthorship W2003652020A5084842265 @default.
• W2003652020 hasAuthorship W2003652020A5088158860 @default.
• W2003652020 hasBestOaLocation W20036520201 @default.
• W2003652020 hasConcept C111368507 @default.
• W2003652020 hasConcept C113196181 @default.
• W2003652020 hasConcept C120665830 @default.
• W2003652020 hasConcept C121332964 @default.
• W2003652020 hasConcept C127313418 @default.
• W2003652020 hasConcept C127413603 @default.
• W2003652020 hasConcept C171250308 @default.
• W2003652020 hasConcept C175708663 @default.
• W2003652020 hasConcept C18293161 @default.
• W2003652020 hasConcept C185592680 @default.
• W2003652020 hasConcept C19067145 @default.
• W2003652020 hasConcept C192157962 @default.
• W2003652020 hasConcept C192562407 @default.
• W2003652020 hasConcept C22423302 @default.
• W2003652020 hasConcept C2777289219 @default.
• W2003652020 hasConcept C2779227376 @default.
• W2003652020 hasConcept C40003534 @default.
• W2003652020 hasConcept C41625074 @default.
• W2003652020 hasConcept C42360764 @default.
• W2003652020 hasConcept C43617362 @default.
• W2003652020 hasConcept C55493867 @default.
• W2003652020 hasConcept C61427134 @default.
• W2003652020 hasConceptScore W2003652020C111368507 @default.
• W2003652020 hasConceptScore W2003652020C113196181 @default.
• W2003652020 hasConceptScore W2003652020C120665830 @default.
• W2003652020 hasConceptScore W2003652020C121332964 @default.
• W2003652020 hasConceptScore W2003652020C127313418 @default.
• W2003652020 hasConceptScore W2003652020C127413603 @default.
• W2003652020 hasConceptScore W2003652020C171250308 @default.
• W2003652020 hasConceptScore W2003652020C175708663 @default.
• W2003652020 hasConceptScore W2003652020C18293161 @default.
• W2003652020 hasConceptScore W2003652020C185592680 @default.
• W2003652020 hasConceptScore W2003652020C19067145 @default.
• W2003652020 hasConceptScore W2003652020C192157962 @default.
• W2003652020 hasConceptScore W2003652020C192562407 @default.
• W2003652020 hasConceptScore W2003652020C22423302 @default.
• W2003652020 hasConceptScore W2003652020C2777289219 @default.
• W2003652020 hasConceptScore W2003652020C2779227376 @default.
• W2003652020 hasConceptScore W2003652020C40003534 @default.
• W2003652020 hasConceptScore W2003652020C41625074 @default.
• W2003652020 hasConceptScore W2003652020C42360764 @default.
• W2003652020 hasConceptScore W2003652020C43617362 @default.
• W2003652020 hasConceptScore W2003652020C55493867 @default.
• W2003652020 hasConceptScore W2003652020C61427134 @default.
• W2003652020 hasLocation W20036520201 @default.
• W2003652020 hasOpenAccess W2003652020 @default.
• W2003652020 hasPrimaryLocation W20036520201 @default.
• W2003652020 hasRelatedWork W1977717576 @default.
• W2003652020 hasRelatedWork W2050744320 @default.
• W2003652020 hasRelatedWork W2085292062 @default.
• W2003652020 hasRelatedWork W2316948141 @default.
• W2003652020 hasRelatedWork W2371191966 @default.
• W2003652020 hasRelatedWork W2379691627 @default.
• W2003652020 hasRelatedWork W2461616264 @default.
• W2003652020 hasRelatedWork W2929003104 @default.
• W2003652020 hasRelatedWork W4231961096 @default.
• W2003652020 hasRelatedWork W4243183952 @default.
• W2003652020 hasVolume "417" @default.
• W2003652020 isParatext "false" @default.

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