Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003666462> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2003666462 abstract "ABSTRACT In this paper we report on the 532 nm Nd:YAG laser-induced crystallization of 10 nm thick boron-doped hydrogenated amorphous silicon thin films deposited on flexible polyimide and on rigid oxidized silicon wafers by hot-wire or by plasma-enhanced chemical vapor deposition. The dark conductivity increased from ∼10 -7 Ω -1 cm -1 , in the as-deposited films, to ∼10 and 50 Ω -1 cm -1 after laser irradiation, on rigid and flexible substrates, respectively. Depending on type of substrate, laser power and fluence, a Raman crystalline fraction between 55 and 90 % was measured in HWCVD films, which was higher than observed in rf-PECVD films (35-55 %). Crystallite size remained small in all cases, in the range 6-8 nm. Due to a very high conductivity contrast (>7 orders of magnitude) between amorphous and crystallized regions, it was possible to define conductive paths in the a-Si:H matrix, by mounting the sample on a X-Y software-controlled movable stage under the laser beam, with no need for the usual lithography steps. The resistors scribed by direct laser writing had piezoresistive properties, with positive gauge factor ∼1. The details of the laser interaction process with the Si film were revealed by scanning electron microscopy imaging." @default.
- W2003666462 created "2016-06-24" @default.
- W2003666462 creator A5017280715 @default.
- W2003666462 creator A5063568119 @default.
- W2003666462 creator A5071900339 @default.
- W2003666462 creator A5085176334 @default.
- W2003666462 creator A5087192803 @default.
- W2003666462 date "2014-01-01" @default.
- W2003666462 modified "2023-09-27" @default.
- W2003666462 title "Piezoresistor Sensor Fabrication by Direct Laser Writing on Hydrogenated Amorphous Silicon" @default.
- W2003666462 cites W1963737791 @default.
- W2003666462 cites W1999265636 @default.
- W2003666462 cites W2004146417 @default.
- W2003666462 cites W2004706511 @default.
- W2003666462 cites W2005044704 @default.
- W2003666462 cites W2008078839 @default.
- W2003666462 cites W2079091677 @default.
- W2003666462 cites W2090682441 @default.
- W2003666462 doi "https://doi.org/10.1557/opl.2014.296" @default.
- W2003666462 hasPublicationYear "2014" @default.
- W2003666462 type Work @default.
- W2003666462 sameAs 2003666462 @default.
- W2003666462 citedByCount "0" @default.
- W2003666462 crossrefType "journal-article" @default.
- W2003666462 hasAuthorship W2003666462A5017280715 @default.
- W2003666462 hasAuthorship W2003666462A5063568119 @default.
- W2003666462 hasAuthorship W2003666462A5071900339 @default.
- W2003666462 hasAuthorship W2003666462A5085176334 @default.
- W2003666462 hasAuthorship W2003666462A5087192803 @default.
- W2003666462 hasBestOaLocation W20036664622 @default.
- W2003666462 hasConcept C120665830 @default.
- W2003666462 hasConcept C121332964 @default.
- W2003666462 hasConcept C160671074 @default.
- W2003666462 hasConcept C185592680 @default.
- W2003666462 hasConcept C192562407 @default.
- W2003666462 hasConcept C2776390347 @default.
- W2003666462 hasConcept C2779667780 @default.
- W2003666462 hasConcept C38347018 @default.
- W2003666462 hasConcept C40003534 @default.
- W2003666462 hasConcept C49040817 @default.
- W2003666462 hasConcept C520434653 @default.
- W2003666462 hasConcept C544956773 @default.
- W2003666462 hasConcept C56052488 @default.
- W2003666462 hasConcept C80086925 @default.
- W2003666462 hasConcept C8010536 @default.
- W2003666462 hasConceptScore W2003666462C120665830 @default.
- W2003666462 hasConceptScore W2003666462C121332964 @default.
- W2003666462 hasConceptScore W2003666462C160671074 @default.
- W2003666462 hasConceptScore W2003666462C185592680 @default.
- W2003666462 hasConceptScore W2003666462C192562407 @default.
- W2003666462 hasConceptScore W2003666462C2776390347 @default.
- W2003666462 hasConceptScore W2003666462C2779667780 @default.
- W2003666462 hasConceptScore W2003666462C38347018 @default.
- W2003666462 hasConceptScore W2003666462C40003534 @default.
- W2003666462 hasConceptScore W2003666462C49040817 @default.
- W2003666462 hasConceptScore W2003666462C520434653 @default.
- W2003666462 hasConceptScore W2003666462C544956773 @default.
- W2003666462 hasConceptScore W2003666462C56052488 @default.
- W2003666462 hasConceptScore W2003666462C80086925 @default.
- W2003666462 hasConceptScore W2003666462C8010536 @default.
- W2003666462 hasLocation W20036664621 @default.
- W2003666462 hasLocation W20036664622 @default.
- W2003666462 hasOpenAccess W2003666462 @default.
- W2003666462 hasPrimaryLocation W20036664621 @default.
- W2003666462 hasRelatedWork W1933123796 @default.
- W2003666462 hasRelatedWork W1993610267 @default.
- W2003666462 hasRelatedWork W2005083586 @default.
- W2003666462 hasRelatedWork W2030656308 @default.
- W2003666462 hasRelatedWork W2044289406 @default.
- W2003666462 hasRelatedWork W2056393091 @default.
- W2003666462 hasRelatedWork W2107493403 @default.
- W2003666462 hasRelatedWork W2146629383 @default.
- W2003666462 hasRelatedWork W2161898765 @default.
- W2003666462 hasRelatedWork W2163623292 @default.
- W2003666462 hasRelatedWork W2167160361 @default.
- W2003666462 hasRelatedWork W2256467297 @default.
- W2003666462 hasRelatedWork W2266188675 @default.
- W2003666462 hasRelatedWork W2301183803 @default.
- W2003666462 hasRelatedWork W2313478326 @default.
- W2003666462 hasRelatedWork W2470008638 @default.
- W2003666462 hasRelatedWork W2536184261 @default.
- W2003666462 hasRelatedWork W2606982803 @default.
- W2003666462 hasRelatedWork W2912720113 @default.
- W2003666462 hasRelatedWork W3133921927 @default.
- W2003666462 hasVolume "1594" @default.
- W2003666462 isParatext "false" @default.
- W2003666462 isRetracted "false" @default.
- W2003666462 magId "2003666462" @default.
- W2003666462 workType "article" @default.