Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003669264> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2003669264 abstract "A cost-effective process with short fabrication time for making x-ray masks for research and development purposes is described here for fabricating high-aspect ratio microelectromechanical structures using synchrotron based x- ray lithography. Microscope cover glass slides as membrane material is described. Slides with an initial thickness of 175 micrometers are etched to a thickness in the range of 10 - 25 micrometers using a diluted HF and buffered hydrofluoric acid solutions. The thinned slides are glued on supportive mask frames and sputtered with a chromium/silver sandwich layer which acts as a plating base layer for the deposition of the gold absorber. The judicial choice of glue and mask frame material are significant parameters in a successful fabrication process. Gold absorber structures are electroplated on the membrane. Calculations are done for contrast and dose ratio obtained in the photoresist after synchrotron radiation as a function of the mask design parameters. Exposure experiments are performed to prove the applicability of the fabricated x-ray mask." @default.
- W2003669264 created "2016-06-24" @default.
- W2003669264 creator A5025015274 @default.
- W2003669264 creator A5028859614 @default.
- W2003669264 creator A5042043461 @default.
- W2003669264 date "1998-07-20" @default.
- W2003669264 modified "2023-09-25" @default.
- W2003669264 title "<title>Development of a low-cost x-ray mask for high-aspect-ratio MEM smart structures</title>" @default.
- W2003669264 doi "https://doi.org/10.1117/12.320168" @default.
- W2003669264 hasPublicationYear "1998" @default.
- W2003669264 type Work @default.
- W2003669264 sameAs 2003669264 @default.
- W2003669264 citedByCount "0" @default.
- W2003669264 crossrefType "proceedings-article" @default.
- W2003669264 hasAuthorship W2003669264A5025015274 @default.
- W2003669264 hasAuthorship W2003669264A5028859614 @default.
- W2003669264 hasAuthorship W2003669264A5042043461 @default.
- W2003669264 hasConcept C120665830 @default.
- W2003669264 hasConcept C121332964 @default.
- W2003669264 hasConcept C127313418 @default.
- W2003669264 hasConcept C134406635 @default.
- W2003669264 hasConcept C136525101 @default.
- W2003669264 hasConcept C142724271 @default.
- W2003669264 hasConcept C160671074 @default.
- W2003669264 hasConcept C16332341 @default.
- W2003669264 hasConcept C171250308 @default.
- W2003669264 hasConcept C192562407 @default.
- W2003669264 hasConcept C204223013 @default.
- W2003669264 hasConcept C204787440 @default.
- W2003669264 hasConcept C2776985018 @default.
- W2003669264 hasConcept C2779227376 @default.
- W2003669264 hasConcept C49040817 @default.
- W2003669264 hasConcept C51807945 @default.
- W2003669264 hasConcept C53524968 @default.
- W2003669264 hasConcept C71924100 @default.
- W2003669264 hasConcept C8058405 @default.
- W2003669264 hasConceptScore W2003669264C120665830 @default.
- W2003669264 hasConceptScore W2003669264C121332964 @default.
- W2003669264 hasConceptScore W2003669264C127313418 @default.
- W2003669264 hasConceptScore W2003669264C134406635 @default.
- W2003669264 hasConceptScore W2003669264C136525101 @default.
- W2003669264 hasConceptScore W2003669264C142724271 @default.
- W2003669264 hasConceptScore W2003669264C160671074 @default.
- W2003669264 hasConceptScore W2003669264C16332341 @default.
- W2003669264 hasConceptScore W2003669264C171250308 @default.
- W2003669264 hasConceptScore W2003669264C192562407 @default.
- W2003669264 hasConceptScore W2003669264C204223013 @default.
- W2003669264 hasConceptScore W2003669264C204787440 @default.
- W2003669264 hasConceptScore W2003669264C2776985018 @default.
- W2003669264 hasConceptScore W2003669264C2779227376 @default.
- W2003669264 hasConceptScore W2003669264C49040817 @default.
- W2003669264 hasConceptScore W2003669264C51807945 @default.
- W2003669264 hasConceptScore W2003669264C53524968 @default.
- W2003669264 hasConceptScore W2003669264C71924100 @default.
- W2003669264 hasConceptScore W2003669264C8058405 @default.
- W2003669264 hasLocation W20036692641 @default.
- W2003669264 hasOpenAccess W2003669264 @default.
- W2003669264 hasPrimaryLocation W20036692641 @default.
- W2003669264 hasRelatedWork W10220797 @default.
- W2003669264 hasRelatedWork W1533320053 @default.
- W2003669264 hasRelatedWork W2020060421 @default.
- W2003669264 hasRelatedWork W2023999549 @default.
- W2003669264 hasRelatedWork W2048457935 @default.
- W2003669264 hasRelatedWork W2061034136 @default.
- W2003669264 hasRelatedWork W2084872867 @default.
- W2003669264 hasRelatedWork W2159372553 @default.
- W2003669264 hasRelatedWork W2187683041 @default.
- W2003669264 hasRelatedWork W4246238382 @default.
- W2003669264 isParatext "false" @default.
- W2003669264 isRetracted "false" @default.
- W2003669264 magId "2003669264" @default.
- W2003669264 workType "article" @default.