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- W2003671946 abstract "We report the deposition of silicon thin films at high rates using atmospheric pressure chemical vapor deposition (AP-CVD) with cyclohexasilane (CHS), a liquid-hydrosilane. A precursor solution of CHS in cyclooctane was aerosolized and subsequently vaporized prior to contacting with the substrate. Using CHS, Si thin films were obtained at temperatures as low as 300°C. A deposition rate of ~50 nm/s was observed at 500°C; while good-quality Si films were realized at 400°C. Structural analysis of the films indicates a combination of amorphous and nano-crystalline Si phases, withe 2-3 orders of photoconductivity." @default.
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- W2003671946 date "2014-06-01" @default.
- W2003671946 modified "2023-09-27" @default.
- W2003671946 title "Atmospheric pressure chemical vapor deposition of silicon thin films using cyclohexasilane" @default.
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- W2003671946 doi "https://doi.org/10.1109/pvsc.2014.6925583" @default.
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