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• W2003802482 abstract "Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation K. Sarakinos, D. Music, S. Mráz, M. to Baben, K. Jiang, F. Nahif, A. Braun, C. Zilkens, S. Konstantinidis, F. Renaux, D. Cossement, F. Munnik, J. M. Schneider; On the phase formation of sputtered hafnium oxide and oxynitride films. Journal of Applied Physics 1 July 2010; 108 (1): 014904. https://doi.org/10.1063/1.3437646 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioJournal of Applied Physics Search Advanced Search |Citation Search" @default.
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• W2003802482 date "2010-07-01" @default.
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• W2003802482 title "On the phase formation of sputtered hafnium oxide and oxynitride films" @default.
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