FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003804702> ?p ?o ?g. }

• W2003804702 endingPage "174" @default.
• W2003804702 startingPage "168" @default.
• W2003804702 abstract "X-ray photoelectron spectroscopy (XPS) and cross-sectional transmission electron microscopy (XTEM) were used to study the formation of AlN films by N+2 ion implantation of aluminium at energies of 3 keV and 100 keV. In both cases, a two-stage mechanism was found, comprising first the oriented precipitation of small particles of the hexagonal AlN-phase, followed by growth and coalescence finally forming a continuous AlN-layer while increasing the implantation dose from 1×1017 cm−2 to 2×1017 cm−2. The results of both methods are in excellent agreement and furthermore provide complementary information concerning chemical composition and binding energies as well as microstructural details." @default.
• W2003804702 created "2016-06-24" @default.
• W2003804702 creator A5002681024 @default.
• W2003804702 creator A5009985797 @default.
• W2003804702 creator A5023850635 @default.
• W2003804702 creator A5087018228 @default.
• W2003804702 creator A5088853865 @default.
• W2003804702 date "1998-04-01" @default.
• W2003804702 modified "2023-10-16" @default.
• W2003804702 title "XPS and XTEM study of AlN formation by N+2 implantation of aluminium" @default.
• W2003804702 cites W1990094524 @default.
• W2003804702 cites W2046484076 @default.
• W2003804702 cites W2047375422 @default.
• W2003804702 cites W2052726626 @default.
• W2003804702 cites W2057778179 @default.
• W2003804702 cites W2061513912 @default.
• W2003804702 cites W2065682618 @default.
• W2003804702 cites W2068545389 @default.
• W2003804702 cites W2156472944 @default.
• W2003804702 cites W2326464703 @default.
• W2003804702 cites W4253056353 @default.
• W2003804702 doi "https://doi.org/10.1016/s0257-8972(98)00355-7" @default.
• W2003804702 hasPublicationYear "1998" @default.
• W2003804702 type Work @default.
• W2003804702 sameAs 2003804702 @default.
• W2003804702 citedByCount "34" @default.
• W2003804702 countsByYear W20038047022012 @default.
• W2003804702 countsByYear W20038047022013 @default.
• W2003804702 countsByYear W20038047022014 @default.
• W2003804702 countsByYear W20038047022015 @default.
• W2003804702 countsByYear W20038047022017 @default.
• W2003804702 countsByYear W20038047022020 @default.
• W2003804702 countsByYear W20038047022022 @default.
• W2003804702 crossrefType "journal-article" @default.
• W2003804702 hasAuthorship W2003804702A5002681024 @default.
• W2003804702 hasAuthorship W2003804702A5009985797 @default.
• W2003804702 hasAuthorship W2003804702A5023850635 @default.
• W2003804702 hasAuthorship W2003804702A5087018228 @default.
• W2003804702 hasAuthorship W2003804702A5088853865 @default.
• W2003804702 hasConcept C107054158 @default.
• W2003804702 hasConcept C113196181 @default.
• W2003804702 hasConcept C121332964 @default.
• W2003804702 hasConcept C127413603 @default.
• W2003804702 hasConcept C128765274 @default.
• W2003804702 hasConcept C145148216 @default.
• W2003804702 hasConcept C146088050 @default.
• W2003804702 hasConcept C149792144 @default.
• W2003804702 hasConcept C153294291 @default.
• W2003804702 hasConcept C171250308 @default.
• W2003804702 hasConcept C175708663 @default.
• W2003804702 hasConcept C178790620 @default.
• W2003804702 hasConcept C185592680 @default.
• W2003804702 hasConcept C191897082 @default.
• W2003804702 hasConcept C192562407 @default.
• W2003804702 hasConcept C41823505 @default.
• W2003804702 hasConcept C42360764 @default.
• W2003804702 hasConcept C43617362 @default.
• W2003804702 hasConcept C513153333 @default.
• W2003804702 hasConcept C8010536 @default.
• W2003804702 hasConcept C87355193 @default.
• W2003804702 hasConceptScore W2003804702C107054158 @default.
• W2003804702 hasConceptScore W2003804702C113196181 @default.
• W2003804702 hasConceptScore W2003804702C121332964 @default.
• W2003804702 hasConceptScore W2003804702C127413603 @default.
• W2003804702 hasConceptScore W2003804702C128765274 @default.
• W2003804702 hasConceptScore W2003804702C145148216 @default.
• W2003804702 hasConceptScore W2003804702C146088050 @default.
• W2003804702 hasConceptScore W2003804702C149792144 @default.
• W2003804702 hasConceptScore W2003804702C153294291 @default.
• W2003804702 hasConceptScore W2003804702C171250308 @default.
• W2003804702 hasConceptScore W2003804702C175708663 @default.
• W2003804702 hasConceptScore W2003804702C178790620 @default.
• W2003804702 hasConceptScore W2003804702C185592680 @default.
• W2003804702 hasConceptScore W2003804702C191897082 @default.
• W2003804702 hasConceptScore W2003804702C192562407 @default.
• W2003804702 hasConceptScore W2003804702C41823505 @default.
• W2003804702 hasConceptScore W2003804702C42360764 @default.
• W2003804702 hasConceptScore W2003804702C43617362 @default.
• W2003804702 hasConceptScore W2003804702C513153333 @default.
• W2003804702 hasConceptScore W2003804702C8010536 @default.
• W2003804702 hasConceptScore W2003804702C87355193 @default.
• W2003804702 hasIssue "1-2" @default.
• W2003804702 hasLocation W20038047021 @default.
• W2003804702 hasOpenAccess W2003804702 @default.
• W2003804702 hasPrimaryLocation W20038047021 @default.
• W2003804702 hasRelatedWork W1563898689 @default.
• W2003804702 hasRelatedWork W2015304907 @default.
• W2003804702 hasRelatedWork W2057535329 @default.
• W2003804702 hasRelatedWork W2130272182 @default.
• W2003804702 hasRelatedWork W2154455733 @default.
• W2003804702 hasRelatedWork W2177706619 @default.
• W2003804702 hasRelatedWork W2343304170 @default.
• W2003804702 hasRelatedWork W3082102535 @default.
• W2003804702 hasRelatedWork W4294280961 @default.
• W2003804702 hasRelatedWork W1561034822 @default.
• W2003804702 hasVolume "102" @default.
• W2003804702 isParatext "false" @default.
• W2003804702 isRetracted "false" @default.

• next