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- W2003807002 abstract "An improved laser generated and laser detected surface acoustic wave (LG/LD SAW) detection system with broad band response based on a differential confocal configuration has been developed to determine the Young’s modulus of a layered structure formed of a thermal SiO2 film on a Si substrate. A dispersion curve with suitable measuring characteristics even at a high frequency range for this kind of measurements was obtained by the system. Fitting the curve processed experimentally with the one obtained by theoretical computation, yielded a value of Young’s modulus within a satisfactory range, and estimated with a high resolution." @default.
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- W2003807002 date "2011-01-01" @default.
- W2003807002 modified "2023-09-27" @default.
- W2003807002 title "A differential confocal LG/LD SAW detection system to determine mechanical properties of layered thin films" @default.
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- W2003807002 doi "https://doi.org/10.1504/ijnm.2011.042473" @default.
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