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- W2003963325 abstract "Low temperature Kelvin Probe Force Microscopy (LT-KFM) can be used to monitor the electronic potential of individual dopants under an electric field. This capability is demonstrated for silicon-on-insulator field-effect-transistors (SOI-FETs) with a phosphorus-doped channel. We show results of the detection of individual dopants in Si by LT-KFM. Furthermore, we also observe single-electron charging in individual dopants located in the Si channel region." @default.
- W2003963325 created "2016-06-24" @default.
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- W2003963325 date "2011-02-01" @default.
- W2003963325 modified "2023-09-27" @default.
- W2003963325 title "KFM Observation of Electron Charging and Discharging in Phosphorus-Doped SOI Channel" @default.
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- W2003963325 doi "https://doi.org/10.4028/www.scientific.net/kem.470.33" @default.
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