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- W2003991711 abstract "Proximity-compensated, as well as uncompensated, blazed transmission gratings with periods of 4, 8, and 16 μm were manufactured with direct-writing, electron-beam lithography in positive resist. The compensated gratings performed better than the uncompensated ones. For the 4-μm compensated grating the measured diffraction efficiency was 67%. It was 35% for the uncompensated grating. The compensation was made by repeated convolutions in the spatial domain with the electron-beam point spread function. We determined this function by retrieving the phase from the measured diffraction pattern of the uncompensated gratings." @default.
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- W2003991711 date "1994-01-01" @default.
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- W2003991711 title "Proximity-compensated blazed transmission grating manufacture with direct-writing, electron-beam lithography" @default.
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- W2003991711 doi "https://doi.org/10.1364/ao.33.000103" @default.
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