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- W2003997535 abstract "The high-current pulsed arc discharge in vacuum used for technology of diamond-like carbon coating deposition is considered. The pulse-periodic carbon plasma flows are generated as a result of graphite cathode sputtering with the use of four-electrode arc system with self-recovering thin-film conductor of ignition device. It was found that fluctuations of plasma radiation intensity are due to formation and decay of cathode spot groups with lifetime of 5−10 μs. Three characteristic spatial zones of discharge radiation are observed - cathode spots, diffuse radiation area of carbon ions near the cathode spots, and molecular carbon emission in the interelectrode gap near the anode attachment. The value of gas-kinetic temperature of plasma was found to be about 1000 K while the plasma electron temperature is approximately 10 eV." @default.
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- W2003997535 date "2010-01-01" @default.
- W2003997535 modified "2023-09-23" @default.
- W2003997535 title "SPECTROSCOPIC AND PROBE DIAGNOSTICS OF CARBON PLASMA FLOWS OF A PULSE VACUUM ARC" @default.
- W2003997535 doi "https://doi.org/10.1615/hightempmatproc.v14.i1-2.130" @default.
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