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- W2003998313 abstract "The structure of optical thin films changes depending on various parameters. Typical these parameters are materials, coating methods and coating parameters (for example, assisted ion beam power <i>etc.</i>). For example, titanium dioxide thin films prepared by IAD (Ion Assisted Deposition) method take the column structure. Foggy levels of the deposited film depend on the film structure. Recently, the foggy levels are measured using a haze meter. But weak foggy sample with small haze value does not correspond to visual inspection. In this work, optical thin films were characterized by not only the intensity of the scattered light but also wavelength parameter. As a result, it was found that the estimation of the structure of optical thin films was possible by using the wavelength dependence of the scattered light." @default.
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- W2003998313 date "2007-02-08" @default.
- W2003998313 modified "2023-09-23" @default.
- W2003998313 title "Characterization of light scattering and film structure of TiO 2 thin film" @default.
- W2003998313 doi "https://doi.org/10.1117/12.699471" @default.
- W2003998313 hasPublicationYear "2007" @default.
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