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• W2004020387 abstract "Thick-film piezoelectric transducers have been produced and tested for implementation into a MEMS ultrasonic sensor array. The arrays are intended to be used for beam forming in sensing applications for fluidics in channels at millimeter or micrometer scale (e.g. flow rate measurement, detection of beads, bubbles). Stripe and matrix aligned elements have been fabricated for one-dimensional and two-dimensional beam steering, respectively. In this contribution we further concentrate on an improved Q-factor and PZT layer homogeneity as a major requirement for the transducer elements." @default.
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• W2004020387 date "2006-04-01" @default.
• W2004020387 modified "2023-10-17" @default.
• W2004020387 title "A new device with PZT ultrasonic transducers in MEMS technology" @default.
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• W2004020387 doi "https://doi.org/10.1088/1742-6596/34/1/078" @default.
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