Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004046460> ?p ?o ?g. }
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- W2004046460 endingPage "2652" @default.
- W2004046460 startingPage "2648" @default.
- W2004046460 abstract "We describe improvements to the interferometric broad-band imaging alignment scheme introduced in 1993. Alignment is signified by matching, across the midline of a charge-coupled device, the spatial phase of interference fringes formed by diffraction from complementary marks on mask and substrate. Image contrast is enhanced by back diffraction from hatched alignment marks on the substrate. Overlayers of resist, polysilicon, and aluminum have negligible effect on interferometric broad-band imaging alignment; they alter image contrast but not spatial phase. Novel alignment marks that incorporate four gratings increase the capture range to several tens of micrometers. By spatial filtering in the back focal plane of the alignment microscope, mask-sample gap may be determined from the resulting spatial phase shift. An alignment system for x-ray nanolithography (XLS-4) that incorporates the interferometric broad-band imaging scheme has been constructed." @default.
- W2004046460 created "2016-06-24" @default.
- W2004046460 creator A5019129969 @default.
- W2004046460 date "1995-11-01" @default.
- W2004046460 modified "2023-10-04" @default.
- W2004046460 title "Immunity to signal degradation by overlayers using a novel spatial-phase-matching alignment system" @default.
- W2004046460 doi "https://doi.org/10.1116/1.588042" @default.
- W2004046460 hasPublicationYear "1995" @default.
- W2004046460 type Work @default.
- W2004046460 sameAs 2004046460 @default.
- W2004046460 citedByCount "13" @default.
- W2004046460 countsByYear W20040464602012 @default.
- W2004046460 countsByYear W20040464602015 @default.
- W2004046460 countsByYear W20040464602020 @default.
- W2004046460 countsByYear W20040464602021 @default.
- W2004046460 countsByYear W20040464602022 @default.
- W2004046460 crossrefType "journal-article" @default.
- W2004046460 hasAuthorship W2004046460A5019129969 @default.
- W2004046460 hasConcept C100921725 @default.
- W2004046460 hasConcept C111368507 @default.
- W2004046460 hasConcept C120665830 @default.
- W2004046460 hasConcept C121332964 @default.
- W2004046460 hasConcept C127162648 @default.
- W2004046460 hasConcept C127313418 @default.
- W2004046460 hasConcept C136525101 @default.
- W2004046460 hasConcept C142724271 @default.
- W2004046460 hasConcept C162117346 @default.
- W2004046460 hasConcept C166689943 @default.
- W2004046460 hasConcept C192562407 @default.
- W2004046460 hasConcept C204787440 @default.
- W2004046460 hasConcept C205372480 @default.
- W2004046460 hasConcept C207114421 @default.
- W2004046460 hasConcept C2777289219 @default.
- W2004046460 hasConcept C32022120 @default.
- W2004046460 hasConcept C41008148 @default.
- W2004046460 hasConcept C44280652 @default.
- W2004046460 hasConcept C49040817 @default.
- W2004046460 hasConcept C62520636 @default.
- W2004046460 hasConcept C71924100 @default.
- W2004046460 hasConcept C76155785 @default.
- W2004046460 hasConceptScore W2004046460C100921725 @default.
- W2004046460 hasConceptScore W2004046460C111368507 @default.
- W2004046460 hasConceptScore W2004046460C120665830 @default.
- W2004046460 hasConceptScore W2004046460C121332964 @default.
- W2004046460 hasConceptScore W2004046460C127162648 @default.
- W2004046460 hasConceptScore W2004046460C127313418 @default.
- W2004046460 hasConceptScore W2004046460C136525101 @default.
- W2004046460 hasConceptScore W2004046460C142724271 @default.
- W2004046460 hasConceptScore W2004046460C162117346 @default.
- W2004046460 hasConceptScore W2004046460C166689943 @default.
- W2004046460 hasConceptScore W2004046460C192562407 @default.
- W2004046460 hasConceptScore W2004046460C204787440 @default.
- W2004046460 hasConceptScore W2004046460C205372480 @default.
- W2004046460 hasConceptScore W2004046460C207114421 @default.
- W2004046460 hasConceptScore W2004046460C2777289219 @default.
- W2004046460 hasConceptScore W2004046460C32022120 @default.
- W2004046460 hasConceptScore W2004046460C41008148 @default.
- W2004046460 hasConceptScore W2004046460C44280652 @default.
- W2004046460 hasConceptScore W2004046460C49040817 @default.
- W2004046460 hasConceptScore W2004046460C62520636 @default.
- W2004046460 hasConceptScore W2004046460C71924100 @default.
- W2004046460 hasConceptScore W2004046460C76155785 @default.
- W2004046460 hasIssue "6" @default.
- W2004046460 hasLocation W20040464601 @default.
- W2004046460 hasOpenAccess W2004046460 @default.
- W2004046460 hasPrimaryLocation W20040464601 @default.
- W2004046460 hasRelatedWork W1972893227 @default.
- W2004046460 hasRelatedWork W1978779974 @default.
- W2004046460 hasRelatedWork W2020267072 @default.
- W2004046460 hasRelatedWork W2038355113 @default.
- W2004046460 hasRelatedWork W2066174673 @default.
- W2004046460 hasRelatedWork W2073426596 @default.
- W2004046460 hasRelatedWork W2080699924 @default.
- W2004046460 hasRelatedWork W2090271102 @default.
- W2004046460 hasRelatedWork W2100180376 @default.
- W2004046460 hasRelatedWork W2370649018 @default.
- W2004046460 hasVolume "13" @default.
- W2004046460 isParatext "false" @default.
- W2004046460 isRetracted "false" @default.
- W2004046460 magId "2004046460" @default.
- W2004046460 workType "article" @default.