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- W2004114672 abstract "In an earlier work we demonstrated the feasibility of automated software correction for imaging and process proximity effects by precompensating mask layout data. As correction techniques and algorithms continue to be refined, it is important to deal with integrating the correction computation into the manufacturing data flow. This paper addresses issues such as computational speed, data volumes, management of the data hierarchy, and the need for geometric operations between various CAD layers within the context of a data hierarchy manager." @default.
- W2004114672 created "2016-06-24" @default.
- W2004114672 creator A5039694997 @default.
- W2004114672 creator A5091251727 @default.
- W2004114672 date "1995-05-26" @default.
- W2004114672 modified "2023-09-23" @default.
- W2004114672 title "<title>Integrating proximity effect corrections with photomask data preparation</title>" @default.
- W2004114672 doi "https://doi.org/10.1117/12.209251" @default.
- W2004114672 hasPublicationYear "1995" @default.
- W2004114672 type Work @default.
- W2004114672 sameAs 2004114672 @default.
- W2004114672 citedByCount "6" @default.
- W2004114672 crossrefType "proceedings-article" @default.
- W2004114672 hasAuthorship W2004114672A5039694997 @default.
- W2004114672 hasAuthorship W2004114672A5091251727 @default.
- W2004114672 hasConcept C11413529 @default.
- W2004114672 hasConcept C115903868 @default.
- W2004114672 hasConcept C124101348 @default.
- W2004114672 hasConcept C127413603 @default.
- W2004114672 hasConcept C14737013 @default.
- W2004114672 hasConcept C151730666 @default.
- W2004114672 hasConcept C162324750 @default.
- W2004114672 hasConcept C178790620 @default.
- W2004114672 hasConcept C185592680 @default.
- W2004114672 hasConcept C194789388 @default.
- W2004114672 hasConcept C199360897 @default.
- W2004114672 hasConcept C199639397 @default.
- W2004114672 hasConcept C2777904410 @default.
- W2004114672 hasConcept C2779227376 @default.
- W2004114672 hasConcept C2779343474 @default.
- W2004114672 hasConcept C31170391 @default.
- W2004114672 hasConcept C34447519 @default.
- W2004114672 hasConcept C41008148 @default.
- W2004114672 hasConcept C45374587 @default.
- W2004114672 hasConcept C53524968 @default.
- W2004114672 hasConcept C78371743 @default.
- W2004114672 hasConcept C86803240 @default.
- W2004114672 hasConcept C98045186 @default.
- W2004114672 hasConceptScore W2004114672C11413529 @default.
- W2004114672 hasConceptScore W2004114672C115903868 @default.
- W2004114672 hasConceptScore W2004114672C124101348 @default.
- W2004114672 hasConceptScore W2004114672C127413603 @default.
- W2004114672 hasConceptScore W2004114672C14737013 @default.
- W2004114672 hasConceptScore W2004114672C151730666 @default.
- W2004114672 hasConceptScore W2004114672C162324750 @default.
- W2004114672 hasConceptScore W2004114672C178790620 @default.
- W2004114672 hasConceptScore W2004114672C185592680 @default.
- W2004114672 hasConceptScore W2004114672C194789388 @default.
- W2004114672 hasConceptScore W2004114672C199360897 @default.
- W2004114672 hasConceptScore W2004114672C199639397 @default.
- W2004114672 hasConceptScore W2004114672C2777904410 @default.
- W2004114672 hasConceptScore W2004114672C2779227376 @default.
- W2004114672 hasConceptScore W2004114672C2779343474 @default.
- W2004114672 hasConceptScore W2004114672C31170391 @default.
- W2004114672 hasConceptScore W2004114672C34447519 @default.
- W2004114672 hasConceptScore W2004114672C41008148 @default.
- W2004114672 hasConceptScore W2004114672C45374587 @default.
- W2004114672 hasConceptScore W2004114672C53524968 @default.
- W2004114672 hasConceptScore W2004114672C78371743 @default.
- W2004114672 hasConceptScore W2004114672C86803240 @default.
- W2004114672 hasConceptScore W2004114672C98045186 @default.
- W2004114672 hasLocation W20041146721 @default.
- W2004114672 hasOpenAccess W2004114672 @default.
- W2004114672 hasPrimaryLocation W20041146721 @default.
- W2004114672 hasRelatedWork W1964981559 @default.
- W2004114672 hasRelatedWork W2011727045 @default.
- W2004114672 hasRelatedWork W2354191910 @default.
- W2004114672 hasRelatedWork W2354407297 @default.
- W2004114672 hasRelatedWork W2369649671 @default.
- W2004114672 hasRelatedWork W2372362617 @default.
- W2004114672 hasRelatedWork W2375007741 @default.
- W2004114672 hasRelatedWork W2382128984 @default.
- W2004114672 hasRelatedWork W2539766227 @default.
- W2004114672 hasRelatedWork W4320160308 @default.
- W2004114672 isParatext "false" @default.
- W2004114672 isRetracted "false" @default.
- W2004114672 magId "2004114672" @default.
- W2004114672 workType "article" @default.