Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004124622> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W2004124622 endingPage "1752" @default.
- W2004124622 startingPage "1748" @default.
- W2004124622 abstract "A new metrological method is presented that performs simultaneous real-time measurements and compensates for 5-DOF parasitic motion errors in translation stages for precision profiling of optical surfaces. Two plane mirrors are used to obtain motion-dependent interferometric fringes generated by the optical principles of Twyman–Green interferometry. The fringes generated are monitored using high-speed 2D photodiode arrays and analyzed to determine the five separate motion error components in real time. Simultaneously, null control is performed to suppress the measured motion errors independently using piezoelectric actuators through real-time feedback control while the machine axis is moving. The experimental results demonstrate that 5-DOF parasitic motion errors are effectively measured and compensated to within 10 nm for translational motions and 0.15 arcsec for angular motions." @default.
- W2004124622 created "2016-06-24" @default.
- W2004124622 creator A5003295110 @default.
- W2004124622 creator A5003891259 @default.
- W2004124622 creator A5030860188 @default.
- W2004124622 creator A5052980552 @default.
- W2004124622 date "2006-11-01" @default.
- W2004124622 modified "2023-10-16" @default.
- W2004124622 title "Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman–Green interferometry" @default.
- W2004124622 cites W1966127959 @default.
- W2004124622 cites W1981852737 @default.
- W2004124622 cites W2041815574 @default.
- W2004124622 cites W2081351243 @default.
- W2004124622 cites W2088411243 @default.
- W2004124622 cites W2091953514 @default.
- W2004124622 doi "https://doi.org/10.1016/j.ijmachtools.2005.12.002" @default.
- W2004124622 hasPublicationYear "2006" @default.
- W2004124622 type Work @default.
- W2004124622 sameAs 2004124622 @default.
- W2004124622 citedByCount "6" @default.
- W2004124622 countsByYear W20041246222015 @default.
- W2004124622 countsByYear W20041246222016 @default.
- W2004124622 countsByYear W20041246222023 @default.
- W2004124622 crossrefType "journal-article" @default.
- W2004124622 hasAuthorship W2004124622A5003295110 @default.
- W2004124622 hasAuthorship W2004124622A5003891259 @default.
- W2004124622 hasAuthorship W2004124622A5030860188 @default.
- W2004124622 hasAuthorship W2004124622A5052980552 @default.
- W2004124622 hasConcept C104317684 @default.
- W2004124622 hasConcept C105580179 @default.
- W2004124622 hasConcept C120665830 @default.
- W2004124622 hasConcept C121332964 @default.
- W2004124622 hasConcept C149364088 @default.
- W2004124622 hasConcept C166689943 @default.
- W2004124622 hasConcept C185592680 @default.
- W2004124622 hasConcept C195766429 @default.
- W2004124622 hasConcept C55493867 @default.
- W2004124622 hasConcept C751236 @default.
- W2004124622 hasConceptScore W2004124622C104317684 @default.
- W2004124622 hasConceptScore W2004124622C105580179 @default.
- W2004124622 hasConceptScore W2004124622C120665830 @default.
- W2004124622 hasConceptScore W2004124622C121332964 @default.
- W2004124622 hasConceptScore W2004124622C149364088 @default.
- W2004124622 hasConceptScore W2004124622C166689943 @default.
- W2004124622 hasConceptScore W2004124622C185592680 @default.
- W2004124622 hasConceptScore W2004124622C195766429 @default.
- W2004124622 hasConceptScore W2004124622C55493867 @default.
- W2004124622 hasConceptScore W2004124622C751236 @default.
- W2004124622 hasIssue "14" @default.
- W2004124622 hasLocation W20041246221 @default.
- W2004124622 hasOpenAccess W2004124622 @default.
- W2004124622 hasPrimaryLocation W20041246221 @default.
- W2004124622 hasRelatedWork W1966176431 @default.
- W2004124622 hasRelatedWork W1974665061 @default.
- W2004124622 hasRelatedWork W2001195527 @default.
- W2004124622 hasRelatedWork W2033686348 @default.
- W2004124622 hasRelatedWork W2054833014 @default.
- W2004124622 hasRelatedWork W2060621643 @default.
- W2004124622 hasRelatedWork W2068355704 @default.
- W2004124622 hasRelatedWork W2151080099 @default.
- W2004124622 hasRelatedWork W2326273876 @default.
- W2004124622 hasRelatedWork W2333321165 @default.
- W2004124622 hasVolume "46" @default.
- W2004124622 isParatext "false" @default.
- W2004124622 isRetracted "false" @default.
- W2004124622 magId "2004124622" @default.
- W2004124622 workType "article" @default.