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- W2004162115 abstract "In this paper we explore modelling and regulation techniques for temperature and crystal growth control in an industrially important process of Czochralski crystal growth. First, a geometrical model for both crystal growth and radius evolution dynamics is developed and a controller is designed based on an input-output linearization to regulate and track a desired reference crystal radius. The pulling based regulated crystal radius control provides a time-varying shape (geometry) evolution of the underlying time-varying partial differential equation describing the crystal temperature dynamics. A low dimensional time-varying parabolic PDE model obtained by Galerkin method is used for regulation of the triple point temperature (melt-solid-encapsulant intersection). The coupling among finite-dimensional crystal radius and triple point temperature regulation is given by the perturbation in the crystal growth parameters and it is induced by possible solid-melt interface temperature fluctuations. We provide a unified regulation framework for such a complex coupled system of crystal growth and temperature regulation in order to improve operational and economic features associated with the Czochralski crystal growth process." @default.
- W2004162115 created "2016-06-24" @default.
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- W2004162115 date "2013-06-01" @default.
- W2004162115 modified "2023-09-26" @default.
- W2004162115 title "Crystal radius and temperature regulation in Czochralski crystallization process" @default.
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- W2004162115 doi "https://doi.org/10.1109/acc.2013.6580068" @default.
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