Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004167692> ?p ?o ?g. }
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- W2004167692 endingPage "76" @default.
- W2004167692 startingPage "73" @default.
- W2004167692 abstract "Abstract Deposition of layers by means of the CVD method takes place with participation of chemical reactions in the gas phases and on solid surface. The reactions in the gaseous phase essentially influence the mechanism of heterogeneous reactions and determine the speed of the layer growth. From our results it can be concluded that the SiC deposition reaction is very complicated. In the gas phase chemical reactions with different transition products take place. Decomposition of these transition products on the surface causes SiC layers formation." @default.
- W2004167692 created "2016-06-24" @default.
- W2004167692 creator A5001620836 @default.
- W2004167692 creator A5058954030 @default.
- W2004167692 creator A5067414962 @default.
- W2004167692 creator A5083998350 @default.
- W2004167692 date "1995-04-01" @default.
- W2004167692 modified "2023-09-26" @default.
- W2004167692 title "Composition of the gas phase during deposition of SiC layers from reactive mixture CH3SiCl3+Ar+H2" @default.
- W2004167692 cites W1973759016 @default.
- W2004167692 cites W1996299817 @default.
- W2004167692 cites W2023146197 @default.
- W2004167692 cites W2024269898 @default.
- W2004167692 cites W2084828272 @default.
- W2004167692 cites W2092690946 @default.
- W2004167692 cites W4250681893 @default.
- W2004167692 doi "https://doi.org/10.1016/0022-2860(95)08712-5" @default.
- W2004167692 hasPublicationYear "1995" @default.
- W2004167692 type Work @default.
- W2004167692 sameAs 2004167692 @default.
- W2004167692 citedByCount "3" @default.
- W2004167692 countsByYear W20041676922020 @default.
- W2004167692 countsByYear W20041676922022 @default.
- W2004167692 crossrefType "journal-article" @default.
- W2004167692 hasAuthorship W2004167692A5001620836 @default.
- W2004167692 hasAuthorship W2004167692A5058954030 @default.
- W2004167692 hasAuthorship W2004167692A5067414962 @default.
- W2004167692 hasAuthorship W2004167692A5083998350 @default.
- W2004167692 hasConcept C121332964 @default.
- W2004167692 hasConcept C127413603 @default.
- W2004167692 hasConcept C138885662 @default.
- W2004167692 hasConcept C151730666 @default.
- W2004167692 hasConcept C175721412 @default.
- W2004167692 hasConcept C178790620 @default.
- W2004167692 hasConcept C185592680 @default.
- W2004167692 hasConcept C2816523 @default.
- W2004167692 hasConcept C3020013744 @default.
- W2004167692 hasConcept C40231798 @default.
- W2004167692 hasConcept C41895202 @default.
- W2004167692 hasConcept C42360764 @default.
- W2004167692 hasConcept C44280652 @default.
- W2004167692 hasConcept C64297162 @default.
- W2004167692 hasConcept C86803240 @default.
- W2004167692 hasConcept C97355855 @default.
- W2004167692 hasConceptScore W2004167692C121332964 @default.
- W2004167692 hasConceptScore W2004167692C127413603 @default.
- W2004167692 hasConceptScore W2004167692C138885662 @default.
- W2004167692 hasConceptScore W2004167692C151730666 @default.
- W2004167692 hasConceptScore W2004167692C175721412 @default.
- W2004167692 hasConceptScore W2004167692C178790620 @default.
- W2004167692 hasConceptScore W2004167692C185592680 @default.
- W2004167692 hasConceptScore W2004167692C2816523 @default.
- W2004167692 hasConceptScore W2004167692C3020013744 @default.
- W2004167692 hasConceptScore W2004167692C40231798 @default.
- W2004167692 hasConceptScore W2004167692C41895202 @default.
- W2004167692 hasConceptScore W2004167692C42360764 @default.
- W2004167692 hasConceptScore W2004167692C44280652 @default.
- W2004167692 hasConceptScore W2004167692C64297162 @default.
- W2004167692 hasConceptScore W2004167692C86803240 @default.
- W2004167692 hasConceptScore W2004167692C97355855 @default.
- W2004167692 hasLocation W20041676921 @default.
- W2004167692 hasOpenAccess W2004167692 @default.
- W2004167692 hasPrimaryLocation W20041676921 @default.
- W2004167692 hasRelatedWork W2008676078 @default.
- W2004167692 hasRelatedWork W2018053177 @default.
- W2004167692 hasRelatedWork W2040219605 @default.
- W2004167692 hasRelatedWork W2061357701 @default.
- W2004167692 hasRelatedWork W2154559694 @default.
- W2004167692 hasRelatedWork W2748952813 @default.
- W2004167692 hasRelatedWork W2913998395 @default.
- W2004167692 hasRelatedWork W2950121066 @default.
- W2004167692 hasRelatedWork W2950296742 @default.
- W2004167692 hasRelatedWork W3005241755 @default.
- W2004167692 hasVolume "349" @default.
- W2004167692 isParatext "false" @default.
- W2004167692 isRetracted "false" @default.
- W2004167692 magId "2004167692" @default.
- W2004167692 workType "article" @default.