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• W2004257002 abstract "Abstract Ion beam bombardment of a solid target results in an emission of energetic atoms and molecules. In general this sputtering process has a complex character. In this work current concepts of sputtering are reviewed in order to extract the common aspects of various models proposed in the literature. Firstly the sharing of projectile energy between atomic constituents of the solid is discussed. Both linear and non-linear processes are considered. Secondly the role of chemical bonds is described in relation to preferential sputtering. Inelastic processes leading to decomposition and sputtering of ionic crystals are also presented. It is shown that the systematic studies of the energy distributions of sputtered particles performed during recent years, allow for the consistent description of compound sputtering in terms of three different mechanisms: collision cascades, spikes and thermal evaporation of decomposed material." @default.
• W2004257002 created "2016-06-24" @default.
• W2004257002 creator A5018420099 @default.
• W2004257002 date "1982-03-01" @default.
• W2004257002 modified "2023-10-06" @default.
• W2004257002 title "Sputtering mechanisms of compound solids" @default.
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• W2004257002 doi "https://doi.org/10.1016/0029-554x(82)90576-6" @default.
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