Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004263602> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2004263602 endingPage "675" @default.
- W2004263602 startingPage "667" @default.
- W2004263602 abstract "Implementation of EUV Lithography (EUVL) for device high volume manufacturing (HVM) requires advanced photoresists capable of meeting the criteria of advanced logic and memory design rules. To achieve the level of performance required, resists must show excellent performance in terms of resolution, LWR (or CDU) and sensitivity. In addition, resists must meet the outgassing criteria required for HVM on the NXE toolset. Lastly, it is anticipated that resists with low OOB sensitivity will also be required. In this paper, we describe our progress in all of these areas. Based on our results, we believe we are on track to deliver production worthy resists for the EUVL era." @default.
- W2004263602 created "2016-06-24" @default.
- W2004263602 creator A5016766358 @default.
- W2004263602 creator A5034555809 @default.
- W2004263602 creator A5044098423 @default.
- W2004263602 creator A5053083938 @default.
- W2004263602 creator A5058655649 @default.
- W2004263602 creator A5073827017 @default.
- W2004263602 creator A5089305792 @default.
- W2004263602 creator A5091365170 @default.
- W2004263602 date "2014-01-01" @default.
- W2004263602 modified "2023-09-27" @default.
- W2004263602 title "Progress Towards Production Worthy EUV Photoresists: Balancing Litho, Outgassing and OOB Performance" @default.
- W2004263602 cites W2081222985 @default.
- W2004263602 cites W2095447808 @default.
- W2004263602 cites W2106658793 @default.
- W2004263602 doi "https://doi.org/10.2494/photopolymer.27.667" @default.
- W2004263602 hasPublicationYear "2014" @default.
- W2004263602 type Work @default.
- W2004263602 sameAs 2004263602 @default.
- W2004263602 citedByCount "2" @default.
- W2004263602 countsByYear W20042636022014 @default.
- W2004263602 countsByYear W20042636022017 @default.
- W2004263602 crossrefType "journal-article" @default.
- W2004263602 hasAuthorship W2004263602A5016766358 @default.
- W2004263602 hasAuthorship W2004263602A5034555809 @default.
- W2004263602 hasAuthorship W2004263602A5044098423 @default.
- W2004263602 hasAuthorship W2004263602A5053083938 @default.
- W2004263602 hasAuthorship W2004263602A5058655649 @default.
- W2004263602 hasAuthorship W2004263602A5073827017 @default.
- W2004263602 hasAuthorship W2004263602A5089305792 @default.
- W2004263602 hasAuthorship W2004263602A5091365170 @default.
- W2004263602 hasBestOaLocation W20042636021 @default.
- W2004263602 hasConcept C1012414 @default.
- W2004263602 hasConcept C120665830 @default.
- W2004263602 hasConcept C121332964 @default.
- W2004263602 hasConcept C127413603 @default.
- W2004263602 hasConcept C1276947 @default.
- W2004263602 hasConcept C146024833 @default.
- W2004263602 hasConcept C162996421 @default.
- W2004263602 hasConcept C171250308 @default.
- W2004263602 hasConcept C192562407 @default.
- W2004263602 hasConcept C200601418 @default.
- W2004263602 hasConcept C204223013 @default.
- W2004263602 hasConcept C21200559 @default.
- W2004263602 hasConcept C24326235 @default.
- W2004263602 hasConcept C2779227376 @default.
- W2004263602 hasConcept C41008148 @default.
- W2004263602 hasConcept C49040817 @default.
- W2004263602 hasConcept C520434653 @default.
- W2004263602 hasConcept C53524968 @default.
- W2004263602 hasConceptScore W2004263602C1012414 @default.
- W2004263602 hasConceptScore W2004263602C120665830 @default.
- W2004263602 hasConceptScore W2004263602C121332964 @default.
- W2004263602 hasConceptScore W2004263602C127413603 @default.
- W2004263602 hasConceptScore W2004263602C1276947 @default.
- W2004263602 hasConceptScore W2004263602C146024833 @default.
- W2004263602 hasConceptScore W2004263602C162996421 @default.
- W2004263602 hasConceptScore W2004263602C171250308 @default.
- W2004263602 hasConceptScore W2004263602C192562407 @default.
- W2004263602 hasConceptScore W2004263602C200601418 @default.
- W2004263602 hasConceptScore W2004263602C204223013 @default.
- W2004263602 hasConceptScore W2004263602C21200559 @default.
- W2004263602 hasConceptScore W2004263602C24326235 @default.
- W2004263602 hasConceptScore W2004263602C2779227376 @default.
- W2004263602 hasConceptScore W2004263602C41008148 @default.
- W2004263602 hasConceptScore W2004263602C49040817 @default.
- W2004263602 hasConceptScore W2004263602C520434653 @default.
- W2004263602 hasConceptScore W2004263602C53524968 @default.
- W2004263602 hasIssue "5" @default.
- W2004263602 hasLocation W20042636021 @default.
- W2004263602 hasOpenAccess W2004263602 @default.
- W2004263602 hasPrimaryLocation W20042636021 @default.
- W2004263602 hasRelatedWork W1967547974 @default.
- W2004263602 hasRelatedWork W1969520063 @default.
- W2004263602 hasRelatedWork W1972965417 @default.
- W2004263602 hasRelatedWork W2004896055 @default.
- W2004263602 hasRelatedWork W2013366102 @default.
- W2004263602 hasRelatedWork W2042461050 @default.
- W2004263602 hasRelatedWork W2052519603 @default.
- W2004263602 hasRelatedWork W2068365482 @default.
- W2004263602 hasRelatedWork W2069810947 @default.
- W2004263602 hasRelatedWork W2073753282 @default.
- W2004263602 hasVolume "27" @default.
- W2004263602 isParatext "false" @default.
- W2004263602 isRetracted "false" @default.
- W2004263602 magId "2004263602" @default.
- W2004263602 workType "article" @default.