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- W2004272328 abstract "We report on the design fabrication and characterization a 3l-period grating composed of subwavelength ridges of progressively varying widths for operation at 10.6 mm. The grating is blazed into the first transmitted order (an efficiency of 80% is measured) under TM po- larization and over a broad range of angles of incidence. The fabrication involves contact photolithography, reactive-ion etching, and an evapora- tion deposition over the etched structure. The result validates the use of photolithography, a low-cost technology, for the manufacture of efficient blazed binary diffractive elements for thermal imaging (the 8- to 12-mm IR band). © 2004 Society of Photo-Optical Instrumentation Engineers." @default.
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- W2004272328 date "2004-11-01" @default.
- W2004272328 modified "2023-09-27" @default.
- W2004272328 title "Blazed binary diffractive gratings with antireflection coating for improved operation at 10.6 μm" @default.
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- W2004272328 doi "https://doi.org/10.1117/1.1802253" @default.
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