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- W2004274057 abstract "By monitoring device electrical parameters during remote plasma dry etching, we have demonstrated a novel method for in situ adjustment of saturation currents. Time-elapsed I-V curves and current-versus-time plots illustrate the low damage, controllable gate recess etching of a metal-semiconductor field-effect transistor device structure and two different high electron mobility transistors. Using a one-dimensional Poisson solver, simulations of conduction versus depth are made and discussed in relation to experimental results." @default.
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- W2004274057 date "1991-11-01" @default.
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- W2004274057 title "In situ device electrical parameter adjustment and monitoring during remote plasma dry etching" @default.
- W2004274057 doi "https://doi.org/10.1116/1.585841" @default.
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