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- W2004276114 abstract "Oxygen sensors can be implemented for temperatures around 1000 °C with thin films of n-semiconducting Ga2O3. Films with thicknesses in the μm region are manufactured by a sputtering technique using a target made of Ga2O3 ceramics. They are deposited on non-conducting BeO ceramic substrates, which yields a stable grain size of about 100 nm. The electrical conductivity of these films depends reversibly according to σ ∼ pO2−14 on the prevailing oxygen partial pressure. The temperature dependence of the electrical conductivity obeys the law σ ∼ exp(2.0eV/kT). Long-term tests over 150 h determine the stability of the sensor characteristic." @default.
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- W2004276114 date "1991-08-01" @default.
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- W2004276114 title "Oxygen sensing with long-term stable Ga2O3 thin films" @default.
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- W2004276114 doi "https://doi.org/10.1016/0925-4005(91)80230-h" @default.
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