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- W2004277844 abstract "Variable angle spectroscopic ellipsometry over the photon energy (E) range 1.5≤E≤5.5 eV has been used to study the structure and optical properties of thin (<400 Å) laser-deposited boron nitride films grown on Si(100). The data are interpreted to indicate that initially the film grows next to the substrate in the cubic phase, followed by a reasonably sharp transition after 50–100 Å of film growth to an amorphous phase." @default.
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- W2004277844 date "1993-04-12" @default.
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- W2004277844 title "Ellipsometric study of boron nitride thin-film growth on Si(100)" @default.
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- W2004277844 doi "https://doi.org/10.1063/1.109599" @default.
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