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- W2004309416 abstract "A high sensitivity focus sensing configuration is employed in the construction of an accurate optical profilometer. The system is analyzed theoretically and experimental investigation indicates a sensitivity better than 3nm with a linear dynamic range of 50μm. The deteriorating effects of finite apertures and various misalignments are also considered and taken into account for improved measuring procedures." @default.
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- W2004309416 date "1989-07-05" @default.
- W2004309416 modified "2023-10-05" @default.
- W2004309416 title "Focus Sensing Optical Profilometer" @default.
- W2004309416 doi "https://doi.org/10.1117/12.951051" @default.
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