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- W2004313404 abstract "A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow." @default.
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- W2004313404 date "2012-06-01" @default.
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- W2004313404 title "Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform" @default.
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- W2004313404 doi "https://doi.org/10.1117/12.921747" @default.
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