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- W2004397315 abstract "The rapid progress of VLSI processing technology has recently raised a new demand for production equipment which is capable of multiple processes sequentially in the multi-chamber system. Mutli-chamber concept seems to be the major trend in the efforts to achieve development and production of sub-micron devices." @default.
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- W2004397315 date "1990-02-15" @default.
- W2004397315 modified "2023-10-05" @default.
- W2004397315 title "Multi-Chamber Deposition System And Its Application To Vlsi Manufacturing Process" @default.
- W2004397315 doi "https://doi.org/10.1117/12.963933" @default.
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