Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004453925> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2004453925 endingPage "1617" @default.
- W2004453925 startingPage "1617" @default.
- W2004453925 abstract "Multilayer-coated Zerodur optics are expected to play a pivotal role in an extreme-ultraviolet (EUV) lithography tool. Zerodur is a multiphase, multicomponent material that is a much more complicated substrate than commonly used single-crystal Si or fused-silica substrates. We investigate the effect of Zerodur substrates on the performance of high-EUV reflectance Mo/Si and Mo/Be multilayer thin films. For Mo/Si the EUV reflectance had a nearly linear dependence on substrate roughness for roughness values of 0.06–0.36 nm rms, and the FWHM of the reflectance curves (spectral bandwidth) was essentially constant over this range. For Mo/Be the EUV reflectance was observed to decrease more steeply than Mo/Si for roughness values greater than approximately 0.2–0.3 nm. Little difference was observed in the EUV reflectivity of multilayer thin films deposited on different substrates as long as the substrate roughness values were similar." @default.
- W2004453925 created "2016-06-24" @default.
- W2004453925 creator A5009897341 @default.
- W2004453925 creator A5037094462 @default.
- W2004453925 creator A5055342690 @default.
- W2004453925 date "2000-04-01" @default.
- W2004453925 modified "2023-10-18" @default.
- W2004453925 title "Mo/Si and Mo/Be multilayer thin films on Zerodur substrates for extreme-ultraviolet lithography" @default.
- W2004453925 cites W1974349905 @default.
- W2004453925 cites W1983837486 @default.
- W2004453925 cites W1999010788 @default.
- W2004453925 cites W2036837577 @default.
- W2004453925 cites W2040480857 @default.
- W2004453925 cites W2061764769 @default.
- W2004453925 cites W2076895950 @default.
- W2004453925 cites W2081890239 @default.
- W2004453925 cites W2169956710 @default.
- W2004453925 cites W4321133471 @default.
- W2004453925 doi "https://doi.org/10.1364/ao.39.001617" @default.
- W2004453925 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/18345060" @default.
- W2004453925 hasPublicationYear "2000" @default.
- W2004453925 type Work @default.
- W2004453925 sameAs 2004453925 @default.
- W2004453925 citedByCount "32" @default.
- W2004453925 countsByYear W20044539252012 @default.
- W2004453925 countsByYear W20044539252013 @default.
- W2004453925 countsByYear W20044539252014 @default.
- W2004453925 countsByYear W20044539252015 @default.
- W2004453925 countsByYear W20044539252016 @default.
- W2004453925 countsByYear W20044539252020 @default.
- W2004453925 countsByYear W20044539252022 @default.
- W2004453925 crossrefType "journal-article" @default.
- W2004453925 hasAuthorship W2004453925A5009897341 @default.
- W2004453925 hasAuthorship W2004453925A5037094462 @default.
- W2004453925 hasAuthorship W2004453925A5055342690 @default.
- W2004453925 hasConcept C107365816 @default.
- W2004453925 hasConcept C111368507 @default.
- W2004453925 hasConcept C120665830 @default.
- W2004453925 hasConcept C121332964 @default.
- W2004453925 hasConcept C127313418 @default.
- W2004453925 hasConcept C146024833 @default.
- W2004453925 hasConcept C159985019 @default.
- W2004453925 hasConcept C162996421 @default.
- W2004453925 hasConcept C171250308 @default.
- W2004453925 hasConcept C19067145 @default.
- W2004453925 hasConcept C192562407 @default.
- W2004453925 hasConcept C204223013 @default.
- W2004453925 hasConcept C2776798109 @default.
- W2004453925 hasConcept C2777289219 @default.
- W2004453925 hasConcept C49040817 @default.
- W2004453925 hasConcept C520434653 @default.
- W2004453925 hasConcept C71039073 @default.
- W2004453925 hasConceptScore W2004453925C107365816 @default.
- W2004453925 hasConceptScore W2004453925C111368507 @default.
- W2004453925 hasConceptScore W2004453925C120665830 @default.
- W2004453925 hasConceptScore W2004453925C121332964 @default.
- W2004453925 hasConceptScore W2004453925C127313418 @default.
- W2004453925 hasConceptScore W2004453925C146024833 @default.
- W2004453925 hasConceptScore W2004453925C159985019 @default.
- W2004453925 hasConceptScore W2004453925C162996421 @default.
- W2004453925 hasConceptScore W2004453925C171250308 @default.
- W2004453925 hasConceptScore W2004453925C19067145 @default.
- W2004453925 hasConceptScore W2004453925C192562407 @default.
- W2004453925 hasConceptScore W2004453925C204223013 @default.
- W2004453925 hasConceptScore W2004453925C2776798109 @default.
- W2004453925 hasConceptScore W2004453925C2777289219 @default.
- W2004453925 hasConceptScore W2004453925C49040817 @default.
- W2004453925 hasConceptScore W2004453925C520434653 @default.
- W2004453925 hasConceptScore W2004453925C71039073 @default.
- W2004453925 hasIssue "10" @default.
- W2004453925 hasLocation W20044539251 @default.
- W2004453925 hasLocation W20044539252 @default.
- W2004453925 hasOpenAccess W2004453925 @default.
- W2004453925 hasPrimaryLocation W20044539251 @default.
- W2004453925 hasRelatedWork W1990897501 @default.
- W2004453925 hasRelatedWork W1996907800 @default.
- W2004453925 hasRelatedWork W2002593357 @default.
- W2004453925 hasRelatedWork W2022331525 @default.
- W2004453925 hasRelatedWork W2027690824 @default.
- W2004453925 hasRelatedWork W2034586420 @default.
- W2004453925 hasRelatedWork W2035418543 @default.
- W2004453925 hasRelatedWork W3053914760 @default.
- W2004453925 hasRelatedWork W3122703849 @default.
- W2004453925 hasRelatedWork W4321520068 @default.
- W2004453925 hasVolume "39" @default.
- W2004453925 isParatext "false" @default.
- W2004453925 isRetracted "false" @default.
- W2004453925 magId "2004453925" @default.
- W2004453925 workType "article" @default.