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- W2004514531 abstract "Silicon oxide films were deposited on crystalline gallium arsenide substrates by chemical vapor deposition (CVD) using a solid source of silicon dioxide and atomic hydrogen as reactant. Infrared (IR) absorption spectra of the samples showed the characteristic bands of SiOSi group, typical of SiO2, and SiH group, but could not detect any band corresponding to OH or SiOH groups." @default.
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- W2004514531 title "Hot-filament-enhanced chemical vapor deposition of silicon oxide films" @default.
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- W2004514531 doi "https://doi.org/10.1016/s0167-577x(99)00282-7" @default.
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