Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004574490> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2004574490 endingPage "2995" @default.
- W2004574490 startingPage "2994" @default.
- W2004574490 abstract "HCl addition to an oxidiing ambient during thermal oxidation of silicon can prevent the generation of oxidation-induced stacking faults in the crystal during the subsequent standard thermal-oxidation cycles. The gettering action of stacking-fault nuclei from the surface regions of the silicon wafers is induced under appropriate HCl oxidation conditions (temperatures, times, and HCl concentrations). Conditions for an undesirable etching of the silicon surface are also presented. These two phenomena presumably occur when certain concentrations of a chlorine species are incorporated near the silicon–silicon dioxide interface." @default.
- W2004574490 created "2016-06-24" @default.
- W2004574490 creator A5091856831 @default.
- W2004574490 date "1978-05-01" @default.
- W2004574490 modified "2023-09-26" @default.
- W2004574490 title "HCl oxidation conditions for stacking‐fault nuclei gettering and for silicon etching" @default.
- W2004574490 cites W1610415505 @default.
- W2004574490 cites W1976641144 @default.
- W2004574490 cites W2007977545 @default.
- W2004574490 cites W2019125029 @default.
- W2004574490 cites W2032359254 @default.
- W2004574490 cites W2034199399 @default.
- W2004574490 cites W2044628328 @default.
- W2004574490 cites W2056985535 @default.
- W2004574490 cites W2058100411 @default.
- W2004574490 cites W2087783518 @default.
- W2004574490 cites W2129130421 @default.
- W2004574490 cites W2986619490 @default.
- W2004574490 doi "https://doi.org/10.1063/1.325148" @default.
- W2004574490 hasPublicationYear "1978" @default.
- W2004574490 type Work @default.
- W2004574490 sameAs 2004574490 @default.
- W2004574490 citedByCount "7" @default.
- W2004574490 crossrefType "journal-article" @default.
- W2004574490 hasAuthorship W2004574490A5091856831 @default.
- W2004574490 hasConcept C100460472 @default.
- W2004574490 hasConcept C125099081 @default.
- W2004574490 hasConcept C127413603 @default.
- W2004574490 hasConcept C160671074 @default.
- W2004574490 hasConcept C171250308 @default.
- W2004574490 hasConcept C178790620 @default.
- W2004574490 hasConcept C179104552 @default.
- W2004574490 hasConcept C185592680 @default.
- W2004574490 hasConcept C191897082 @default.
- W2004574490 hasConcept C192562407 @default.
- W2004574490 hasConcept C199360897 @default.
- W2004574490 hasConcept C2778536302 @default.
- W2004574490 hasConcept C2779089622 @default.
- W2004574490 hasConcept C2779227376 @default.
- W2004574490 hasConcept C2779281663 @default.
- W2004574490 hasConcept C2779667780 @default.
- W2004574490 hasConcept C2781285689 @default.
- W2004574490 hasConcept C33347731 @default.
- W2004574490 hasConcept C41008148 @default.
- W2004574490 hasConcept C42360764 @default.
- W2004574490 hasConcept C49040817 @default.
- W2004574490 hasConcept C505241676 @default.
- W2004574490 hasConcept C544956773 @default.
- W2004574490 hasConceptScore W2004574490C100460472 @default.
- W2004574490 hasConceptScore W2004574490C125099081 @default.
- W2004574490 hasConceptScore W2004574490C127413603 @default.
- W2004574490 hasConceptScore W2004574490C160671074 @default.
- W2004574490 hasConceptScore W2004574490C171250308 @default.
- W2004574490 hasConceptScore W2004574490C178790620 @default.
- W2004574490 hasConceptScore W2004574490C179104552 @default.
- W2004574490 hasConceptScore W2004574490C185592680 @default.
- W2004574490 hasConceptScore W2004574490C191897082 @default.
- W2004574490 hasConceptScore W2004574490C192562407 @default.
- W2004574490 hasConceptScore W2004574490C199360897 @default.
- W2004574490 hasConceptScore W2004574490C2778536302 @default.
- W2004574490 hasConceptScore W2004574490C2779089622 @default.
- W2004574490 hasConceptScore W2004574490C2779227376 @default.
- W2004574490 hasConceptScore W2004574490C2779281663 @default.
- W2004574490 hasConceptScore W2004574490C2779667780 @default.
- W2004574490 hasConceptScore W2004574490C2781285689 @default.
- W2004574490 hasConceptScore W2004574490C33347731 @default.
- W2004574490 hasConceptScore W2004574490C41008148 @default.
- W2004574490 hasConceptScore W2004574490C42360764 @default.
- W2004574490 hasConceptScore W2004574490C49040817 @default.
- W2004574490 hasConceptScore W2004574490C505241676 @default.
- W2004574490 hasConceptScore W2004574490C544956773 @default.
- W2004574490 hasIssue "5" @default.
- W2004574490 hasLocation W20045744901 @default.
- W2004574490 hasOpenAccess W2004574490 @default.
- W2004574490 hasPrimaryLocation W20045744901 @default.
- W2004574490 hasRelatedWork W2004574490 @default.
- W2004574490 hasRelatedWork W2020802000 @default.
- W2004574490 hasRelatedWork W2070649724 @default.
- W2004574490 hasRelatedWork W2087995876 @default.
- W2004574490 hasRelatedWork W2130583547 @default.
- W2004574490 hasRelatedWork W2375074881 @default.
- W2004574490 hasRelatedWork W2390671174 @default.
- W2004574490 hasRelatedWork W2978827255 @default.
- W2004574490 hasRelatedWork W3135216591 @default.
- W2004574490 hasRelatedWork W4239056382 @default.
- W2004574490 hasVolume "49" @default.
- W2004574490 isParatext "false" @default.
- W2004574490 isRetracted "false" @default.
- W2004574490 magId "2004574490" @default.
- W2004574490 workType "article" @default.