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- W2004602647 abstract "In this paper, we report single-crystal 4H-SiC resonant structures fabricated by dopant-selective photoelectrochemical etching. The frequency response of the resonant beams was characterized by a dynamic scanning method using AFM with the beams excited by a piezoelectric actuator under atmosphere pressure and room temperature. The beam with a length of 35 μm shows mechanical resonance at 945 kHz. The Young’s modulus of single-crystal SiC was derived from the measured resonant frequency. Single-crystal 4H-SiC resonators developed in this study fully exploit the excellent electrical, mechanical, and chemical properties of SiC, while dopant-selective photoelectrochemical etching technique significantly simplifies the fabrication process." @default.
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- W2004602647 date "2012-05-01" @default.
- W2004602647 modified "2023-10-12" @default.
- W2004602647 title "Single-Crystal SiC Resonators by Photoelectrochemical Etching" @default.
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- W2004602647 doi "https://doi.org/10.4028/www.scientific.net/msf.717-720.529" @default.
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