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- W2004605090 endingPage "71" @default.
- W2004605090 startingPage "65" @default.
- W2004605090 abstract "Plasma-enhanced (PE) CVD from α-methylstyrene is a dry method for synthesizing directly patternable sacrificial materials for generating pores or air dielectric layers. Films deposited at low power excitation (40 W) decompose between 65 °C and 75 °C, leave minimal residue following a 400 °C anneal for 2 h, and have spectroscopic signatures of linear poly(α-methylstyrene) (PaMS) as determined by nuclear magnetic resonance (NMR) spectroscopy and Fourier transform infrared (FTIR) spectroscopy. Increased plasma excitation power leads to cross-linking and increased residue after annealing. All films also contain hydroxyl and carbonyl groups after exposure to air. Significant C–O–C inclusion occurs under continuous plasma excitation but not under pulsed-plasma conditions." @default.
- W2004605090 created "2016-06-24" @default.
- W2004605090 creator A5061958103 @default.
- W2004605090 creator A5066209549 @default.
- W2004605090 date "2003-03-17" @default.
- W2004605090 modified "2023-10-09" @default.
- W2004605090 title "Structure and Thermal Properties of Thin Film Poly(α-methylstyrene) Deposited via Plasma-Enhanced Chemical Vapor Deposition" @default.
- W2004605090 doi "https://doi.org/10.1002/cvde.200390004" @default.
- W2004605090 hasPublicationYear "2003" @default.
- W2004605090 type Work @default.
- W2004605090 sameAs 2004605090 @default.
- W2004605090 citedByCount "17" @default.
- W2004605090 countsByYear W20046050902013 @default.
- W2004605090 countsByYear W20046050902015 @default.
- W2004605090 countsByYear W20046050902016 @default.
- W2004605090 countsByYear W20046050902017 @default.
- W2004605090 countsByYear W20046050902019 @default.
- W2004605090 countsByYear W20046050902020 @default.
- W2004605090 countsByYear W20046050902023 @default.
- W2004605090 crossrefType "journal-article" @default.
- W2004605090 hasAuthorship W2004605090A5061958103 @default.
- W2004605090 hasAuthorship W2004605090A5066209549 @default.
- W2004605090 hasConcept C113196181 @default.
- W2004605090 hasConcept C119599485 @default.
- W2004605090 hasConcept C120665830 @default.
- W2004605090 hasConcept C121332964 @default.
- W2004605090 hasConcept C127413603 @default.
- W2004605090 hasConcept C153642686 @default.
- W2004605090 hasConcept C158355884 @default.
- W2004605090 hasConcept C159985019 @default.
- W2004605090 hasConcept C160892712 @default.
- W2004605090 hasConcept C171250308 @default.
- W2004605090 hasConcept C178790620 @default.
- W2004605090 hasConcept C185592680 @default.
- W2004605090 hasConcept C19067145 @default.
- W2004605090 hasConcept C192562407 @default.
- W2004605090 hasConcept C2777855556 @default.
- W2004605090 hasConcept C32891209 @default.
- W2004605090 hasConcept C42360764 @default.
- W2004605090 hasConcept C57410435 @default.
- W2004605090 hasConcept C62520636 @default.
- W2004605090 hasConcept C82706917 @default.
- W2004605090 hasConcept C83581075 @default.
- W2004605090 hasConceptScore W2004605090C113196181 @default.
- W2004605090 hasConceptScore W2004605090C119599485 @default.
- W2004605090 hasConceptScore W2004605090C120665830 @default.
- W2004605090 hasConceptScore W2004605090C121332964 @default.
- W2004605090 hasConceptScore W2004605090C127413603 @default.
- W2004605090 hasConceptScore W2004605090C153642686 @default.
- W2004605090 hasConceptScore W2004605090C158355884 @default.
- W2004605090 hasConceptScore W2004605090C159985019 @default.
- W2004605090 hasConceptScore W2004605090C160892712 @default.
- W2004605090 hasConceptScore W2004605090C171250308 @default.
- W2004605090 hasConceptScore W2004605090C178790620 @default.
- W2004605090 hasConceptScore W2004605090C185592680 @default.
- W2004605090 hasConceptScore W2004605090C19067145 @default.
- W2004605090 hasConceptScore W2004605090C192562407 @default.
- W2004605090 hasConceptScore W2004605090C2777855556 @default.
- W2004605090 hasConceptScore W2004605090C32891209 @default.
- W2004605090 hasConceptScore W2004605090C42360764 @default.
- W2004605090 hasConceptScore W2004605090C57410435 @default.
- W2004605090 hasConceptScore W2004605090C62520636 @default.
- W2004605090 hasConceptScore W2004605090C82706917 @default.
- W2004605090 hasConceptScore W2004605090C83581075 @default.
- W2004605090 hasIssue "2" @default.
- W2004605090 hasLocation W20046050901 @default.
- W2004605090 hasOpenAccess W2004605090 @default.
- W2004605090 hasPrimaryLocation W20046050901 @default.
- W2004605090 hasRelatedWork W1989814320 @default.
- W2004605090 hasRelatedWork W2358724321 @default.
- W2004605090 hasRelatedWork W2364310969 @default.
- W2004605090 hasRelatedWork W2370565142 @default.
- W2004605090 hasRelatedWork W2993252407 @default.
- W2004605090 hasRelatedWork W3200495424 @default.
- W2004605090 hasRelatedWork W4200560195 @default.
- W2004605090 hasRelatedWork W4205602753 @default.
- W2004605090 hasRelatedWork W4285231436 @default.
- W2004605090 hasRelatedWork W94011976 @default.
- W2004605090 hasVolume "9" @default.
- W2004605090 isParatext "false" @default.
- W2004605090 isRetracted "false" @default.
- W2004605090 magId "2004605090" @default.
- W2004605090 workType "article" @default.