FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004608972> ?p ?o ?g. }

• W2004608972 endingPage "2546" @default.
• W2004608972 startingPage "2542" @default.
• W2004608972 abstract "The thermal stability of Ni-silicides on tensily strained in situ P doped Si:C epitaxial layers was evaluated. The baseline Ni silicidation process was shown to be compatible with Si:C Recessed Source-Drain (RSD) stressors for NMOS strain engineering while the thermal stability of NiSi:C contacts was significantly improved compared to NiSi ones. Dominant degradation mechanism was shown to be the transition to the NiSi2:C phase. It was demonstrated that the Si:C strain level affects the silicide formation but has no significant effect on the NiSi:C thermal stability. A mechanism responsible for the improved thermal stability of NiSi:C silicides is discussed." @default.
• W2004608972 created "2016-06-24" @default.
• W2004608972 creator A5000659788 @default.
• W2004608972 creator A5006538977 @default.
• W2004608972 creator A5047124947 @default.
• W2004608972 creator A5048298130 @default.
• W2004608972 creator A5050889627 @default.
• W2004608972 creator A5053974804 @default.
• W2004608972 creator A5063622796 @default.
• W2004608972 creator A5063826502 @default.
• W2004608972 creator A5066246571 @default.
• W2004608972 creator A5070926330 @default.
• W2004608972 creator A5083191622 @default.
• W2004608972 creator A5083358214 @default.
• W2004608972 creator A5089967944 @default.
• W2004608972 creator A5091668324 @default.
• W2004608972 date "2007-11-01" @default.
• W2004608972 modified "2023-10-02" @default.
• W2004608972 title "Improved thermal stability of Ni-silicides on Si:C epitaxial layers" @default.
• W2004608972 cites W1986920321 @default.
• W2004608972 cites W1993917137 @default.
• W2004608972 cites W2037948734 @default.
• W2004608972 cites W2326128466 @default.
• W2004608972 cites W2330204793 @default.
• W2004608972 doi "https://doi.org/10.1016/j.mee.2007.05.017" @default.
• W2004608972 hasPublicationYear "2007" @default.
• W2004608972 type Work @default.
• W2004608972 sameAs 2004608972 @default.
• W2004608972 citedByCount "27" @default.
• W2004608972 countsByYear W20046089722012 @default.
• W2004608972 countsByYear W20046089722013 @default.
• W2004608972 countsByYear W20046089722014 @default.
• W2004608972 countsByYear W20046089722015 @default.
• W2004608972 countsByYear W20046089722016 @default.
• W2004608972 crossrefType "journal-article" @default.
• W2004608972 hasAuthorship W2004608972A5000659788 @default.
• W2004608972 hasAuthorship W2004608972A5006538977 @default.
• W2004608972 hasAuthorship W2004608972A5047124947 @default.
• W2004608972 hasAuthorship W2004608972A5048298130 @default.
• W2004608972 hasAuthorship W2004608972A5050889627 @default.
• W2004608972 hasAuthorship W2004608972A5053974804 @default.
• W2004608972 hasAuthorship W2004608972A5063622796 @default.
• W2004608972 hasAuthorship W2004608972A5063826502 @default.
• W2004608972 hasAuthorship W2004608972A5066246571 @default.
• W2004608972 hasAuthorship W2004608972A5070926330 @default.
• W2004608972 hasAuthorship W2004608972A5083191622 @default.
• W2004608972 hasAuthorship W2004608972A5083358214 @default.
• W2004608972 hasAuthorship W2004608972A5089967944 @default.
• W2004608972 hasAuthorship W2004608972A5091668324 @default.
• W2004608972 hasConcept C110738630 @default.
• W2004608972 hasConcept C119599485 @default.
• W2004608972 hasConcept C126322002 @default.
• W2004608972 hasConcept C127413603 @default.
• W2004608972 hasConcept C159985019 @default.
• W2004608972 hasConcept C165801399 @default.
• W2004608972 hasConcept C172385210 @default.
• W2004608972 hasConcept C191897082 @default.
• W2004608972 hasConcept C192562407 @default.
• W2004608972 hasConcept C197162436 @default.
• W2004608972 hasConcept C24326235 @default.
• W2004608972 hasConcept C2778022156 @default.
• W2004608972 hasConcept C2779227376 @default.
• W2004608972 hasConcept C2779679103 @default.
• W2004608972 hasConcept C2780901251 @default.
• W2004608972 hasConcept C42360764 @default.
• W2004608972 hasConcept C544956773 @default.
• W2004608972 hasConcept C59061564 @default.
• W2004608972 hasConcept C71924100 @default.
• W2004608972 hasConceptScore W2004608972C110738630 @default.
• W2004608972 hasConceptScore W2004608972C119599485 @default.
• W2004608972 hasConceptScore W2004608972C126322002 @default.
• W2004608972 hasConceptScore W2004608972C127413603 @default.
• W2004608972 hasConceptScore W2004608972C159985019 @default.
• W2004608972 hasConceptScore W2004608972C165801399 @default.
• W2004608972 hasConceptScore W2004608972C172385210 @default.
• W2004608972 hasConceptScore W2004608972C191897082 @default.
• W2004608972 hasConceptScore W2004608972C192562407 @default.
• W2004608972 hasConceptScore W2004608972C197162436 @default.
• W2004608972 hasConceptScore W2004608972C24326235 @default.
• W2004608972 hasConceptScore W2004608972C2778022156 @default.
• W2004608972 hasConceptScore W2004608972C2779227376 @default.
• W2004608972 hasConceptScore W2004608972C2779679103 @default.
• W2004608972 hasConceptScore W2004608972C2780901251 @default.
• W2004608972 hasConceptScore W2004608972C42360764 @default.
• W2004608972 hasConceptScore W2004608972C544956773 @default.
• W2004608972 hasConceptScore W2004608972C59061564 @default.
• W2004608972 hasConceptScore W2004608972C71924100 @default.
• W2004608972 hasIssue "11" @default.
• W2004608972 hasLocation W20046089721 @default.
• W2004608972 hasOpenAccess W2004608972 @default.
• W2004608972 hasPrimaryLocation W20046089721 @default.
• W2004608972 hasRelatedWork W1879025855 @default.
• W2004608972 hasRelatedWork W1968907284 @default.
• W2004608972 hasRelatedWork W2004608972 @default.
• W2004608972 hasRelatedWork W2019789324 @default.
• W2004608972 hasRelatedWork W2022507789 @default.
• W2004608972 hasRelatedWork W2027331290 @default.
• W2004608972 hasRelatedWork W2052111573 @default.

• next