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- W2004651617 endingPage "435" @default.
- W2004651617 startingPage "429" @default.
- W2004651617 abstract "A self-consistent two-dimensional three moment radio-frequency glow discharge model has been developed for methane feed gas using a fluid model to study the charged species dynamics and its effects on deposition in a polyatomic gas discharge. Swarm data as a function of electron energy are provided as input to the model. The discharge is electropositive since positive ion density is more than negative ion density. The importance of two-dimensional modeling has been emphasized by comparing the plasma variables with those of a one-dimensional model. The model predicts both the radial and axial variations of species densities, electron energy and electric field. The off-axis maxima in species densities, typical for two-dimensional discharge, can be observed. The asymmetry of the discharge generates a self dc bias that has been predicted by a trial and error method. The model also calculates the radial variations of species fluxes to the cathode that are important to predict the film deposition." @default.
- W2004651617 created "2016-06-24" @default.
- W2004651617 creator A5005581153 @default.
- W2004651617 creator A5045318953 @default.
- W2004651617 creator A5091032983 @default.
- W2004651617 date "1998-01-01" @default.
- W2004651617 modified "2023-10-16" @default.
- W2004651617 title "Modeling of Two-Dimensional Radio-Frequency Methane Glow Discharge in Cylindrical Geometry." @default.
- W2004651617 cites W1995006131 @default.
- W2004651617 cites W2009490843 @default.
- W2004651617 cites W2065725998 @default.
- W2004651617 cites W2067979108 @default.
- W2004651617 cites W2070048544 @default.
- W2004651617 cites W2071657553 @default.
- W2004651617 cites W2077543115 @default.
- W2004651617 cites W2122374175 @default.
- W2004651617 doi "https://doi.org/10.1299/jsmeb.41.429" @default.
- W2004651617 hasPublicationYear "1998" @default.
- W2004651617 type Work @default.
- W2004651617 sameAs 2004651617 @default.
- W2004651617 citedByCount "5" @default.
- W2004651617 countsByYear W20046516172012 @default.
- W2004651617 countsByYear W20046516172021 @default.
- W2004651617 countsByYear W20046516172022 @default.
- W2004651617 crossrefType "journal-article" @default.
- W2004651617 hasAuthorship W2004651617A5005581153 @default.
- W2004651617 hasAuthorship W2004651617A5045318953 @default.
- W2004651617 hasAuthorship W2004651617A5091032983 @default.
- W2004651617 hasBestOaLocation W20046516171 @default.
- W2004651617 hasConcept C121332964 @default.
- W2004651617 hasConcept C178790620 @default.
- W2004651617 hasConcept C185592680 @default.
- W2004651617 hasConcept C192562407 @default.
- W2004651617 hasConcept C24890656 @default.
- W2004651617 hasConcept C2524010 @default.
- W2004651617 hasConcept C2776595061 @default.
- W2004651617 hasConcept C33923547 @default.
- W2004651617 hasConcept C516920438 @default.
- W2004651617 hasConcept C57879066 @default.
- W2004651617 hasConcept C62520636 @default.
- W2004651617 hasConcept C82706917 @default.
- W2004651617 hasConceptScore W2004651617C121332964 @default.
- W2004651617 hasConceptScore W2004651617C178790620 @default.
- W2004651617 hasConceptScore W2004651617C185592680 @default.
- W2004651617 hasConceptScore W2004651617C192562407 @default.
- W2004651617 hasConceptScore W2004651617C24890656 @default.
- W2004651617 hasConceptScore W2004651617C2524010 @default.
- W2004651617 hasConceptScore W2004651617C2776595061 @default.
- W2004651617 hasConceptScore W2004651617C33923547 @default.
- W2004651617 hasConceptScore W2004651617C516920438 @default.
- W2004651617 hasConceptScore W2004651617C57879066 @default.
- W2004651617 hasConceptScore W2004651617C62520636 @default.
- W2004651617 hasConceptScore W2004651617C82706917 @default.
- W2004651617 hasIssue "2" @default.
- W2004651617 hasLocation W20046516171 @default.
- W2004651617 hasOpenAccess W2004651617 @default.
- W2004651617 hasPrimaryLocation W20046516171 @default.
- W2004651617 hasRelatedWork W1984422166 @default.
- W2004651617 hasRelatedWork W2020813724 @default.
- W2004651617 hasRelatedWork W2038488825 @default.
- W2004651617 hasRelatedWork W2069495557 @default.
- W2004651617 hasRelatedWork W2100411018 @default.
- W2004651617 hasRelatedWork W2268012881 @default.
- W2004651617 hasRelatedWork W2918720026 @default.
- W2004651617 hasRelatedWork W328603058 @default.
- W2004651617 hasRelatedWork W175909043 @default.
- W2004651617 hasRelatedWork W2518945719 @default.
- W2004651617 hasVolume "41" @default.
- W2004651617 isParatext "false" @default.
- W2004651617 isRetracted "false" @default.
- W2004651617 magId "2004651617" @default.
- W2004651617 workType "article" @default.