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- W2004687621 abstract "A method of measuring small frequency change is described which utilizes an oscillator whose resonant frequency can be controlled by a biased varactor diode. A phase comparator ensures that the voltage across the varactor is that required to make the oscillator frequency identical with the frequency of the source under investigation. Changes in source frequency are then indicated by changes in diode bias. The method has been used to measure film thickness with the resonant quartz crystal and the stylus profile monitor." @default.
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- W2004687621 date "1969-01-01" @default.
- W2004687621 modified "2023-09-23" @default.
- W2004687621 title "A method of measuring small frequency change and its application to two methods of thin film thickness measurement" @default.
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- W2004687621 doi "https://doi.org/10.1088/0022-3735/2/1/436" @default.
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