Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004692362> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2004692362 endingPage "140" @default.
- W2004692362 startingPage "137" @default.
- W2004692362 abstract "A number of BSOI structures, applicable to CMOS devices, were analysed. Interfacial impurities and process generated defects, such as dislocations, are potentially detrimental to the electronic properties of these materials and analytical techniques which can reveal the presence of such problems are of vital importance. In this paper we present data which shows how CL and SIMS can combine to identify such problems. We have identified an interaction between the presence of boron and hydrogen species in the SiO2 layer and also give evidence to suggest that the combination of electron beam exposure and thermal cycling can modify the electronic properties of the oxide." @default.
- W2004692362 created "2016-06-24" @default.
- W2004692362 creator A5029268984 @default.
- W2004692362 creator A5063270790 @default.
- W2004692362 creator A5083245088 @default.
- W2004692362 date "1997-06-01" @default.
- W2004692362 modified "2023-09-25" @default.
- W2004692362 title "The characterisation of Bonded Silicon on Insulator (BSOI) structures using low temperature scanning cathodoluminescence (CL) and secondary ion mass spectrometry (SIMS)" @default.
- W2004692362 cites W1965250030 @default.
- W2004692362 cites W1988109615 @default.
- W2004692362 cites W1999629320 @default.
- W2004692362 cites W2056878109 @default.
- W2004692362 cites W2078953836 @default.
- W2004692362 doi "https://doi.org/10.1016/s0167-9317(97)00034-8" @default.
- W2004692362 hasPublicationYear "1997" @default.
- W2004692362 type Work @default.
- W2004692362 sameAs 2004692362 @default.
- W2004692362 citedByCount "0" @default.
- W2004692362 crossrefType "journal-article" @default.
- W2004692362 hasAuthorship W2004692362A5029268984 @default.
- W2004692362 hasAuthorship W2004692362A5063270790 @default.
- W2004692362 hasAuthorship W2004692362A5083245088 @default.
- W2004692362 hasConcept C113196181 @default.
- W2004692362 hasConcept C139861200 @default.
- W2004692362 hasConcept C145148216 @default.
- W2004692362 hasConcept C148869448 @default.
- W2004692362 hasConcept C162356407 @default.
- W2004692362 hasConcept C171250308 @default.
- W2004692362 hasConcept C178790620 @default.
- W2004692362 hasConcept C185592680 @default.
- W2004692362 hasConcept C191897082 @default.
- W2004692362 hasConcept C192562407 @default.
- W2004692362 hasConcept C2779851234 @default.
- W2004692362 hasConcept C2909539053 @default.
- W2004692362 hasConcept C43617362 @default.
- W2004692362 hasConcept C49040817 @default.
- W2004692362 hasConcept C501308230 @default.
- W2004692362 hasConcept C50774322 @default.
- W2004692362 hasConcept C512968161 @default.
- W2004692362 hasConcept C53143962 @default.
- W2004692362 hasConcept C544956773 @default.
- W2004692362 hasConcept C71987851 @default.
- W2004692362 hasConcept C77671233 @default.
- W2004692362 hasConceptScore W2004692362C113196181 @default.
- W2004692362 hasConceptScore W2004692362C139861200 @default.
- W2004692362 hasConceptScore W2004692362C145148216 @default.
- W2004692362 hasConceptScore W2004692362C148869448 @default.
- W2004692362 hasConceptScore W2004692362C162356407 @default.
- W2004692362 hasConceptScore W2004692362C171250308 @default.
- W2004692362 hasConceptScore W2004692362C178790620 @default.
- W2004692362 hasConceptScore W2004692362C185592680 @default.
- W2004692362 hasConceptScore W2004692362C191897082 @default.
- W2004692362 hasConceptScore W2004692362C192562407 @default.
- W2004692362 hasConceptScore W2004692362C2779851234 @default.
- W2004692362 hasConceptScore W2004692362C2909539053 @default.
- W2004692362 hasConceptScore W2004692362C43617362 @default.
- W2004692362 hasConceptScore W2004692362C49040817 @default.
- W2004692362 hasConceptScore W2004692362C501308230 @default.
- W2004692362 hasConceptScore W2004692362C50774322 @default.
- W2004692362 hasConceptScore W2004692362C512968161 @default.
- W2004692362 hasConceptScore W2004692362C53143962 @default.
- W2004692362 hasConceptScore W2004692362C544956773 @default.
- W2004692362 hasConceptScore W2004692362C71987851 @default.
- W2004692362 hasConceptScore W2004692362C77671233 @default.
- W2004692362 hasIssue "1-4" @default.
- W2004692362 hasLocation W20046923621 @default.
- W2004692362 hasOpenAccess W2004692362 @default.
- W2004692362 hasPrimaryLocation W20046923621 @default.
- W2004692362 hasRelatedWork W1978851048 @default.
- W2004692362 hasRelatedWork W2008094532 @default.
- W2004692362 hasRelatedWork W2063677047 @default.
- W2004692362 hasRelatedWork W2077426526 @default.
- W2004692362 hasRelatedWork W2086011292 @default.
- W2004692362 hasRelatedWork W2088081281 @default.
- W2004692362 hasRelatedWork W2140461901 @default.
- W2004692362 hasRelatedWork W259438701 @default.
- W2004692362 hasRelatedWork W4293192141 @default.
- W2004692362 hasRelatedWork W3098109639 @default.
- W2004692362 hasVolume "36" @default.
- W2004692362 isParatext "false" @default.
- W2004692362 isRetracted "false" @default.
- W2004692362 magId "2004692362" @default.
- W2004692362 workType "article" @default.