Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004698461> ?p ?o ?g. }
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- W2004698461 endingPage "1470" @default.
- W2004698461 startingPage "1461" @default.
- W2004698461 abstract "The major species present in a fluorocarbon plasma environment were simulated and independently controlled using radical and ion beams in an ultrahigh-vacuum apparatus. The beams used in this study were chosen to determine the importance of CFx radicals in a CF4 plasma; the beams included F and CF2, with a beam of Ar+ to simulate energetic ion bombardment. Both CF2 and F enhance the etching yield of SiO2 under energetic Ar+ bombardment; however, the enhancement with F is twice that seen with CF2 at similar fluxes. When CF2 and F fluxes are used simultaneously, F dominates and the CF2 flux has little effect on the overall etching yield. Combined with previous work on Si substrates, these results are consistent with qualitative theories for SiO2/Si selectivity in fluorocarbon plasmas. Possible elementary steps in the ion-enhanced etching process are proposed and reduced to a two-parameter model which represents the process as ion-enhanced neutral adsorption followed by ion-induced reaction to form volatile products." @default.
- W2004698461 created "2016-06-24" @default.
- W2004698461 creator A5062061801 @default.
- W2004698461 date "1991-05-01" @default.
- W2004698461 modified "2023-09-26" @default.
- W2004698461 title "Plasma–surface interactions in fluorocarbon etching of silicon dioxide" @default.
- W2004698461 doi "https://doi.org/10.1116/1.585451" @default.
- W2004698461 hasPublicationYear "1991" @default.
- W2004698461 type Work @default.
- W2004698461 sameAs 2004698461 @default.
- W2004698461 citedByCount "80" @default.
- W2004698461 countsByYear W20046984612012 @default.
- W2004698461 countsByYear W20046984612013 @default.
- W2004698461 countsByYear W20046984612014 @default.
- W2004698461 countsByYear W20046984612015 @default.
- W2004698461 countsByYear W20046984612016 @default.
- W2004698461 countsByYear W20046984612017 @default.
- W2004698461 countsByYear W20046984612018 @default.
- W2004698461 countsByYear W20046984612019 @default.
- W2004698461 countsByYear W20046984612020 @default.
- W2004698461 countsByYear W20046984612022 @default.
- W2004698461 crossrefType "journal-article" @default.
- W2004698461 hasAuthorship W2004698461A5062061801 @default.
- W2004698461 hasConcept C100460472 @default.
- W2004698461 hasConcept C107187091 @default.
- W2004698461 hasConcept C113196181 @default.
- W2004698461 hasConcept C121332964 @default.
- W2004698461 hasConcept C130472188 @default.
- W2004698461 hasConcept C134121241 @default.
- W2004698461 hasConcept C139066938 @default.
- W2004698461 hasConcept C145148216 @default.
- W2004698461 hasConcept C147789679 @default.
- W2004698461 hasConcept C150394285 @default.
- W2004698461 hasConcept C159985019 @default.
- W2004698461 hasConcept C178790620 @default.
- W2004698461 hasConcept C184779094 @default.
- W2004698461 hasConcept C185544564 @default.
- W2004698461 hasConcept C185592680 @default.
- W2004698461 hasConcept C192562407 @default.
- W2004698461 hasConcept C2776875633 @default.
- W2004698461 hasConcept C2779089622 @default.
- W2004698461 hasConcept C2779227376 @default.
- W2004698461 hasConcept C544956773 @default.
- W2004698461 hasConcept C68709404 @default.
- W2004698461 hasConcept C82706917 @default.
- W2004698461 hasConceptScore W2004698461C100460472 @default.
- W2004698461 hasConceptScore W2004698461C107187091 @default.
- W2004698461 hasConceptScore W2004698461C113196181 @default.
- W2004698461 hasConceptScore W2004698461C121332964 @default.
- W2004698461 hasConceptScore W2004698461C130472188 @default.
- W2004698461 hasConceptScore W2004698461C134121241 @default.
- W2004698461 hasConceptScore W2004698461C139066938 @default.
- W2004698461 hasConceptScore W2004698461C145148216 @default.
- W2004698461 hasConceptScore W2004698461C147789679 @default.
- W2004698461 hasConceptScore W2004698461C150394285 @default.
- W2004698461 hasConceptScore W2004698461C159985019 @default.
- W2004698461 hasConceptScore W2004698461C178790620 @default.
- W2004698461 hasConceptScore W2004698461C184779094 @default.
- W2004698461 hasConceptScore W2004698461C185544564 @default.
- W2004698461 hasConceptScore W2004698461C185592680 @default.
- W2004698461 hasConceptScore W2004698461C192562407 @default.
- W2004698461 hasConceptScore W2004698461C2776875633 @default.
- W2004698461 hasConceptScore W2004698461C2779089622 @default.
- W2004698461 hasConceptScore W2004698461C2779227376 @default.
- W2004698461 hasConceptScore W2004698461C544956773 @default.
- W2004698461 hasConceptScore W2004698461C68709404 @default.
- W2004698461 hasConceptScore W2004698461C82706917 @default.
- W2004698461 hasIssue "3" @default.
- W2004698461 hasLocation W20046984611 @default.
- W2004698461 hasOpenAccess W2004698461 @default.
- W2004698461 hasPrimaryLocation W20046984611 @default.
- W2004698461 hasRelatedWork W1969256561 @default.
- W2004698461 hasRelatedWork W2003452706 @default.
- W2004698461 hasRelatedWork W2004698461 @default.
- W2004698461 hasRelatedWork W2022949630 @default.
- W2004698461 hasRelatedWork W2033449584 @default.
- W2004698461 hasRelatedWork W2073886832 @default.
- W2004698461 hasRelatedWork W2075857585 @default.
- W2004698461 hasRelatedWork W2166096633 @default.
- W2004698461 hasRelatedWork W4247234118 @default.
- W2004698461 hasRelatedWork W1905667603 @default.
- W2004698461 hasVolume "9" @default.
- W2004698461 isParatext "false" @default.
- W2004698461 isRetracted "false" @default.
- W2004698461 magId "2004698461" @default.
- W2004698461 workType "article" @default.