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- W2004702024 abstract "Dichlorosilane, a gas at normal temperature with a boiling point of 8.3°C, is very difficult to sample and detect using conventional methods. We reduced phosphorus in dichlorosilane to PH 3 by hydrogen at high temperature, then PH 3 was separated from chlorosilanes by NaOH solution and from other hydrides by chromatographic absorption. Thus the problem of interference of chlorosilanes and other hydrides was overcome and PH 3 was measured by a double flame photometric detector at 526 nm. This method was sensitive, reliable and convenient and the sensitivity reached as low as 0.04 μg/l." @default.
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- W2004702024 date "1997-01-01" @default.
- W2004702024 modified "2023-09-26" @default.
- W2004702024 title "Measurement of trace phosphorus in dichlorosilane by high-temperature hydrogen reduction gas chromatography" @default.
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- W2004702024 doi "https://doi.org/10.1016/s0021-9673(96)00653-x" @default.
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